Method for fabrication of a semiconductor device and structure

Abstract

A method for fabrication of 3D semiconductor devices utilizing a layer transfer and steps for forming transistors on top of a pre-fabricated semiconductor device comprising transistors formed on crystallized semiconductor base layer and metal layer for the transistors interconnections and insulation layer. The advantage of this approach is reduction of the over all metal length used to interconnect the various transistors.

Description

CROSS-REFERENCE OF RELATED APPLICATION[0001]This application is a divisional application of co-pending U.S. patent application Ser. No. 12 / 792,673, which claims priority of co-pending U.S. patent application Ser. Nos. 12 / 577,532 and 12 / 706,520, the contents of which are incorporated by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]Various embodiments of the present invention may relate to configurable logic arrays and / or fabrication methods for a Field Programmable Logic Array—FPGA.[0004]2. Discussion of Background Art[0005]Semiconductor manufacturing is known to improve device density in an exponential manner over time, but such improvements do come with a price. The mask set cost required for each new process technology has been increasing exponentially. So while 20 years ago a mask set cost less than $20,000 it is now quite common to be charged more than $1M for today's state of the art device mask set.[0006]These changes represent an increasing challe...

AI Technical Summary

Benefits of technology

[0020]Embodiments of the present invention seek to provide a new method for semiconductor device fabrication that may be highly desirable for custom products. Embodiments of the current invention suggest the use of a Re-programmable antifuse in conjunction with ‘Through Silicon Via’ to construct a new type of configurable logic, or as usually called, FPGA devices. Embodiments of the current invention may provide a solution to the challenge of high mask-set cost and low flexibility that exists in the current common methods of semiconductor fabrication. An additional advantage of some embodiments of the invention is that it could reduce the high cost of manufacturing the many different mask sets required in order to provide a commercially viable range of master slices. Embodiments of the current invention may improve upon the prior art in many respects, which may include the way the semiconductor device is structured and methods related to the fabrication of semiconductor devices.

[0024]Unlike the operating transistors that are desired to operate as fast as possible, to enable fast system performance, the programming circuits could operate relatively slowly. Accordingly using a thin film transistor for the programming circuits could fit very well with the required function and would reduce the required silicon area.

[0025]The programming circuits may, therefore, be constructed with thin film transistors, which may be fabricated after the fabrication of the operating circuitry, on top of the configurable interconnection layers that incorporate and use the antifuses. An additional advantage of such embodiments of the invention is the ability to reduce cost of the high volume production. One may only need to use mask-defined links instead of the antifuses and their programming circuits. This will in most cases require one custom via mask, and this may save steps associated with the fabrication of the antifuse layers, the thin film transistors, and / or the associated connection layers of the programming circuitry.

Problems solved by technology

Semiconductor manufacturing is known to improve device density in an exponential manner over time, but such improvements do come with a price.

The mask set cost required for each new process technology has been increasing exponentially.

These changes represent an increasing challenge primarily to custom products, which tend to target smaller volume and less diverse markets therefore making the increased cost of product development very hard to accommodate.

Yet, it is always a challenge to come up with minimum set of Master Slices that will provide a good fit for the maximal number of designs because it is quite costly if a dedicated mask set is required for each Master Slice.

The difficulty to provide variable-sized array structure devices is due to the need of providing I / O cells and associated pads to connect the device to the package.

This method places a severe limitation on the I / O cell to use the same type of transistors as used for the logic and; hence, would not allow the use of higher operating voltages for the I / O.

These circuits are complex and require a far larger silicon area than conventional I / Os.

This implies that even the use of the borderless logic array of the prior art will still require multiple expensive mask sets.

However, unlike vias that are made with the same metal that is used for the interconnection, these antifuses generally use amorphous silicon and some additional interface layers.

In fact, it seems that no one is advancing Antifuse FPGA devices anymore.

One of the severe disadvantages of antifuse technology has been their lack of re-programmability.

Another disadvantage has been the special silicon manufacturing process required for the antifuse technology which results in extra development costs and the associated time lag with respect to baseline IC technology scaling.

The general disadvantage of common FPGA technologies is their relatively poor use of silicon area.

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