EUV pod with fastening structure

Abstract

An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

Description

CROSS-REFERENCES TO RELATED APPLICATIONS[0001]This application claims priority to Taiwan Patent Application No. 100101022, filed Jan. 11, 2011, the contents of which are hereby incorporated by reference in their entirety.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention is related to a reticle pod, and more particularly, to an EUV pod with fastening structure.[0004]2. Description of the Prior Art[0005]In the rapidly developing modern semiconductor technology, optical lithography tool plays an important role. The pattern definition relies fully on optical lithography technology. In the application of optical lithography tool related to semiconductors, pre-designed circuit paths are fabricated as light-transparent reticle in specific form. Basing on the principle of exposure, after light from the light source passes through the reticle and is projected on a silicon wafer, specific circuit pattern can be exposed on the silicon wafer. However, since a...

AI Technical Summary

Benefits of technology

[0009]In order to solve the above-mentioned problem, one primary object of the present invention is to provide a reticle pod, in which supporters disposed on the outer container are used to press retainers of the inner container for indirectly fastening reticle inside the pod and thus ensuring the safety and stability of the reticle inside.

[0010]Another primary object of the present invention is to provide a reticle pod, in which supporters disposed on the outer container are used to press retainers of the inner container for preventing the inner container from shifting and further ensuring the safety of the reticle inside the inner container.

[0012]By utilizing the design provided by the present invention, the reticle can be stably fastened in the inner container of the reticle pod and the inner container can also be fastened. The effect of fastening both the reticle and the inner container is thus achieved. Therefore, not only the risks of collisions of reticle in the pod due to vacillation of reticle pod during transportation can be reduced, but the cost incurred by cracks and damages of reticles can also be greatly decreased.

[0015]By using the design provided by the present invention, when the inner container storing a reticle is introduced into the manufacturing process, the reticle inside can be monitored through the window from the platform for ensuring that the reticle inside is correctly positioned and thus preventing cracks of reticles from occurring during the process of transferring.

Problems solved by technology

However, since any kind of dust (such as particles, powders, and organic matters) that adhere to the reticle can result in quality degradation of projected pattern, the reticle used to produce pattern on silicon wafers is required to be kept absolutely clean.

However, in such double-layer pod structure, the user is unable to determine whether the inner container is stably snap-fastened by the supporters of the outer container and is unable to make sure the positioning status of the reticle in the inner container either.

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