Method of manufacturing substrate having cavity
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Modification Example 1
[0065]In the first manufacturing method, a step of bonding an adhesive sheet 12 on the bottom surface of the base layer 11 was used (refer to FIG. 2), but as shown in FIG. 9, a sheet-shaped material made of a material for the insulating layer 15 that has not yet been cured may be bonded on the bottom surface of the base layer 11 instead of the adhesive sheet 12, with the sheet-shaped material being cured by heat treatment after the bottom surface of the dummy part 13 inserted in the penetrating hole 11a is bonded to the sheet-shaped material. In this manner, it is possible to omit the aforementioned step.
Example
Modification Example 2
[0066]In the first manufacturing method, a step is used in which a ring-shaped gap between the inner wall of the penetrating hole 11a and the outer wall of the dummy part 13 is filled with a material for the insulating portion 14 that has not yet been cured (refer to FIG. 2), but as shown in FIG. 10, the process may be performed such that a sheet-shaped material made of a material for the insulating layer 15 that has not yet been cured is bonded to the bottom surface of the base layer 11 and the bottom surface of the dummy part 13 inserted in the penetrating hole11a is bonded to the sheet-shaped material, and then a sheet-shaped material made of a material for the insulating layer 16 that has not yet been cured is bonded to the top surface of the base layer 11, and then at least one of the two sheet-shaped members is pressed towards the base layer 11 such that a portion thereof fills the ring-shaped gap, the remaining portion thereof being left in a layer form ...
Example
Modification Example 3
[0067]In the first manufacturing method, wiring lines (signal wiring lines 17a and ground wiring lines 17b) are provided in the lower insulating layers (insulating layer 15 and insulating layer 19), and wiring lines (signal wiring lines 18a and ground wiring lines 18b) are provided in the upper insulating layers (insulating layer 16 and insulating layer 20), but the wiring lines may be provided only in either of the lower insulating layers and the upper insulating layers. Alternatively, wiring lines may be present in two or more layers by adding the step of forming the insulating layers and the step of forming the wiring lines.
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