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Sensing device

a technology of sensing device and sensor, which is applied in the direction of speed measurement using gyroscopic effects, instruments, surveying and navigation, etc., can solve the problems of preventing their widespread use in the industry

Active Publication Date: 2022-11-03
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This approach minimizes energy losses and zero-rate output errors, enhancing the accuracy and reliability of MEMS devices by making their component stiffnesses substantially isotropic and reducing the impact of fabrication imperfections.

Problems solved by technology

However, historically their cost, size, and power requirements have prevented their widespread use in industries such as consumer products, gaming devices, automobiles, and handheld positioning systems.
Another potential problem with the sensing device 110 in FIG. 6 relates to anisotropic stiffness of its resonant member 112.

Method used

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Examples

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Embodiment Construction

[0052]Example embodiments are described and illustrated in the drawings. These examples are not intended to be a limitation on the present invention. For example, one or more aspects can be utilized in other embodiments and even other types of devices. Moreover, certain terminology is used herein for convenience only and is not to be taken as a limitation.

[0053]Turning to FIG. 1, an example sensing device 10 includes a resonant member 12, an anchor 14 that is fixed to a substrate 16 and flexibly supports the resonant member 12, and a plurality of electrodes 18 that are capacitively coupled to the resonant member 12. The sensing device 10 in the present embodiment corresponds to a MEMS gyroscope. However, the sensing device 10 can correspond to other sensing devices in other examples such as a MEM accelerometer.

[0054]The resonant member 12 is flexibly supported by the anchor 14 such that the resonant member 12 is movable in two resonant modes a drive mode and a sense mode. In the pre...

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Abstract

A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.

Description

TECHNICAL FIELD[0001]This application relates generally to a sensing device and more particularly, a sensing device such as a MEMS gyroscope or MEMS accelerometer.BACKGROUND ART[0002]Inertial measurement devices, such as gyroscopes and accelerometers, provide high-precision sensing. However, historically their cost, size, and power requirements have prevented their widespread use in industries such as consumer products, gaming devices, automobiles, and handheld positioning systems.[0003]More recently, micro-electro-mechanical systems (MEMS) sensor devices have been gaining increased attention from multiple industries since micro-machining technologies have made fabrication of miniature gyroscopes and accelerometers possible. Miniaturization also enables integration of MEMS devices with readout electronics on the same die, resulting in reduced size, cost, and power consumption as well as improved resolution by reducing noise. Consumer products such as digital cameras, 3D gaming equip...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01C19/5712G01P1/00G01P15/125
CPCG01C19/5712G01P1/00G01P15/125G01C19/5755
Inventor PAL, SAGNIKSERRANO, DIEGO EMILIONUNAN, THOMAS KIERAN
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD