Large-area body surface organic volatile matter vacuum-sealing sampling chamber

Abstract

The invention discloses a device which by using negative pressure absorbing the sampling room on a object with large surface area performs the organic volatile matter survey. Its structure comprises a sampling room shell, above which an air entrance and a air collecting port is there. The lower end has a opening and the out cycle of the opening stretches outside forming a flange which has on it a vacuum slot and a vacuum air draining port communicating with each other.

Description

technical field [0001] The invention relates to a vacuum-sealed sampling chamber for organic volatiles, in particular to a vacuum-sealed sampling chamber for organic volatiles that can be used on the surface of large-area objects. Background technique [0002] According to Moore's law (Moor's law), the feature size of all electronic components is shrinking day by day, so any tiny impurities such as particles, organic matter and chemical pollution in the production process may cause the yield to decrease. In the deep sub-micron process, the degree of relative influence of impurities is becoming more and more serious, so the monitoring of impurities is an important issue in the clean rooms of various semiconductor factories, but tangible pollutants such as fine dust, toner on data files, etc. It can be controlled or removed by the clean room before entering the clean room, or it can be automatically processed by machinery such as a mechanical arm without pollution sources. How...

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Problems solved by technology

[0004] However, such an analysis method is a destructive analysis method. Objects with a large area such as walls cannot be placed in the sample chamber, and volatiles are analyzed on surfaces that are not easy to cut or are at an angle to the ground. will cause analytical difficulties

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