Apparatus for inner surface modification by plasma source ion implantation

Abstract

The invention relates to a device for inner surface modification by injecting plasma ion source, wherein: setting a tubular work-piece into a processing chamber, laying a columnar electrode and a tubular electrode allowing plasma diffusion in the tubular work-piece from inside to out side coaxially_ contacting the two electrodes with the radio frequency power supply, connecting a negative high tension supply between the tubular electrode and the tubular work-piece, also including a driving device capable of making relative rotation between tubular work-piece and tubular electrode; the tubular electrode is made up of electrode wires on the outer surface of tubular support, the electrode wires are in circumferential uniform distribution or screw-type distribution; the columnar electrode is a hollow tube with magnetic-irons in it; the tubular electrode is an interconnected hollow metal tube. the magnetic-irons are ring, and axially uniformly distributed with homopolarity opposition. The invention intensifies the sputtering of plasma to center electrode material by setting magnetic-irons in the tubular electrode, and improves the processing efficiency of tubular work-piece inner surface.

Description

Technical field [0001] The invention relates to a plasma source ion implantation technology, in particular to a plasma source ion implantation device for inner surface modification. Background technique [0002] At present, plasma source implantation (PS II) is a new material surface ion implantation technology, such as in the literature J. Appl. Phys. (Journal of Applied Phys.) Vol. 62 (1987) pages 4591-4596 by JR Conrad The article "Plasma source-implantation technique for surface modification of materials" by JLRadtke, RADodd, Frank J. Worzala, and Ngoc C. Tran introduces such a plasma source ion implantation technique. But at this time, the PSII technology can not be used to directly inject the inner surface of the tubular workpiece into the inner surface of the pipe with a diameter-to-length ratio of less than 0.6. In order to solve this problem, the applicant proposed a method for modifying the inner surface of tubular workpieces based on PS II technology in a Chinese inven...

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Problems solved by technology

But at this time, directly using PSII technology to inject the inner surface of the tubular workpiece cannot be used to treat the inner surface of the pipe with a diameter-to-length ratio of less than 0.6.

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