Apparatus for inner surface modification by plasma source ion implantation

A technology of plasma source and ion implantation, which is applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems that cannot be used to treat the inner surface of pipe fittings, etc., and achieve a modified inner surface of tubular workpieces Uniformity, improve corrosion resistance and wear resistance, and improve efficiency

Inactive Publication Date: 2005-07-06
INST OF PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

But at this time, directly using PSII technology to inject the inner surface of the tubular workpiece cannot be used to treat the inner surface of the pipe with a diameter-to-length ratio of less than 0.6.

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  • Apparatus for inner surface modification by plasma source ion implantation
  • Apparatus for inner surface modification by plasma source ion implantation
  • Apparatus for inner surface modification by plasma source ion implantation

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Embodiment Construction

[0024] The device for plasma source ion implantation inner surface modification of the present invention, such as figure 1 As shown, it mainly includes a processing chamber 10 with a vacuum device 11. The processing chamber 10 is connected to the working gas source argon cylinder 14 and nitrogen cylinder 15 through a fine-tuning needle valve 7; in the processing chamber 10, a columnar electrode 8, a tubular electrode 9 Arranged coaxially with the tubular workpiece 4 from inside to outside, the cylindrical electrode 8 is placed in the center of the tubular workpiece 4, and a tubular electrode 9 composed of electrode wires uniformly distributed in the circumferential direction is arranged between the cylindrical electrode 8 and the tubular workpiece 4; 9 and the columnar electrode 8 are connected to a radio frequency power supply 5, wherein the columnar electrode 8 is connected to the power pole of the radio frequency power supply 5 through a DC blocking capacitor 6, and the tubu...

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Abstract

The invention relates to a device for inner surface modification by injecting plasma ion source, wherein: setting a tubular work-piece into a processing chamber, laying a columnar electrode and a tubular electrode allowing plasma diffusion in the tubular work-piece from inside to out side coaxially_ contacting the two electrodes with the radio frequency power supply, connecting a negative high tension supply between the tubular electrode and the tubular work-piece, also including a driving device capable of making relative rotation between tubular work-piece and tubular electrode; the tubular electrode is made up of electrode wires on the outer surface of tubular support, the electrode wires are in circumferential uniform distribution or screw-type distribution; the columnar electrode is a hollow tube with magnetic-irons in it; the tubular electrode is an interconnected hollow metal tube. the magnetic-irons are ring, and axially uniformly distributed with homopolarity opposition. The invention intensifies the sputtering of plasma to center electrode material by setting magnetic-irons in the tubular electrode, and improves the processing efficiency of tubular work-piece inner surface.

Description

technical field [0001] The invention relates to the ion implantation technology using a plasma source, in particular to a device for modifying the inner surface of the plasma source ion implantation. Background technique [0002] At present, plasma source implantation (PSII) is a new material surface ion implantation technology, such as in J.Appl.Phys. Such a plasma source ion implantation technique is described in "Plasma sourceion-implantation technique for surface modification of materials" by J.L. Radtke, R.A. Dodd, Frank J. Worzala, and Ngoc C. Tran. But at this time, directly injecting the inner surface of the tubular workpiece with PSII technology cannot be used to treat the inner surface of the pipe with a diameter-to-length ratio of less than 0.6. In order to solve this problem, the applicant proposed a method for modifying the inner surface of a tubular workpiece based on PSII technology in the Chinese invention patent application (publication number: 1382829) pub...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/48
Inventor 杨思泽张谷令王久丽刘元富
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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