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Smif load port interface including smart port door

An access door and access device technology, used in transportation and packaging, thin material handling, furnaces, etc., can solve the problems of container door cover damage, particle generation, production interruption, etc., and minimize production downtime.

Inactive Publication Date: 2008-09-17
克罗森自动控制有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] If the front surface of the container door is farther from the access door than expected, the access door lock key may not fit properly into the container door key slot when the container is pushed
This leads to damage of the lock key to the container door cover, which generates particles and prevents the container door from being opened, causing interruptions and delays in production

Method used

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  • Smif load port interface including smart port door
  • Smif load port interface including smart port door
  • Smif load port interface including smart port door

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0055] see Figure 6A with 6B The first embodiment shown abuts the access door 104 preferably with the container door 22 fully advanced. In this example, the contact position of the container and access door induces a voltage of 1 volt across the circuit 130 (the circuit can be calibrated to have a different voltage when the door is in contact position). In the particular container of this example, due to tolerances of the container, movable pins and / or access doors, or deformation of the container, after the container pusher plate 114 is fully advanced, the spacing between the aisle and the container door will be greater than desired, as Figure 6A , and induces a voltage of 2.5 volts across circuit 130. Accordingly, the controller determines that the position of the access door 104 must be adjusted toward the container door 22 by an amount such that the voltage on the circuit 130 drops by 1.5 volts. (In this embodiment, the potentiometer 134 is positioned relative to the ...

example 2

[0058] now refer to Figure 7A with 7B , describing another instance. In this example, a final spacing of 20 mils between the front surface of the container and the access door is preferred, which in this example would result in 2 volts across the resistive sensing circuit. With the container in this particular example, when the container pusher plate 114 is fully advanced, the spacing between the channel and the container door will be less than desired, as Figure 7A , and will cause a voltage of 1.25 volts to appear on circuit 130. Accordingly, the controller determines that the position of the access door 104 must be adjusted away from the container door 22 by a value that increases the voltage on the circuit 130 by 0.75 volts. Assuming that every 20 milli-inch pin position change corresponds to a voltage change of 1 volt, the controller determines that the access door 104 needs to retract 15 milli-inches to the loading channel, as Figure 7B shown to achieve the final ...

example 3

[0064] The following will be combined again Figure 6A with 6B , illustrating an example of the operation of the invention according to this alternative control algorithm. In one embodiment of the present invention, in its fully extended position, latch 124 may extend 100 mils beyond the front surface of access door 104, and preferably container door 22 abuts access door 104 in its final position. For the container in this example, after the initial contact of the front surface of the container door 22 with the front end of the latch 124, the container pusher plate 114 is advanced another 80 mils to its fully advanced position. Thus, in this example, the controller determines that the distance between the container and the access door after the container is advanced is 20 mils. Accordingly, the controller advances the access door 104 an additional 20 mils toward the container door 22, as Figure 6B shown to achieve the final ideal spacing between the channel and the contain...

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PUM

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Abstract

A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and / or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.

Description

technical field [0001] The present invention relates to a standard mechanical interface (SMIF) loading access device comprising a so-called "smart" access door, and more particularly to a SMIF loading access device including a means for compensating the position of the access door, capable of dynamically adjusting The relative spacing between the front surface of the access door and the front surface of the container loaded into the loading channel arrangement, so that the deviation of the front surface of the container can be compensated. Background technique [0002] US Patents No. 4,532,970 and No. 4,534,389 disclose a SMIF system proposed by Hewlett-Packard Company. The purpose of the SMIF system is to reduce particle flow on semiconductor wafers during wafer storage and transfer during semiconductor manufacturing processes. To a certain extent, this purpose is achieved by physically ensuring that the gaseous medium (such as air or nitrogen) around the wafer is basically...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/68B65G49/07H01L21/677
CPCY10S414/14H01L21/67775H01L21/67259H01L21/67772
Inventor 弗雷德里克·T·罗森库斯特
Owner 克罗森自动控制有限公司