Slide unit, fluid dynamic pressure bearing and motor employed the same
A technology for sliding parts and sliding surfaces, which is applied in sliding contact bearings, rotating bearings, bearings, etc., can solve problems such as increased spark discharge, achieve the effects of increasing rotation speed, suppressing short-term grinding, and reducing frictional resistance
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Embodiment 1~7、 comparative example 1~6
[0168] Contains the following three types of particles and MgO and ZrO as sintering aids 2 , Y 2 o 3 and Yb 2 o 3 The components of are modulated to form Figure 1 ~ Figure 4 The shaft 2, the sleeve 3 and the flange 4 of the fluid dynamic pressure bearing 1 shown are raw materials of ceramics.
[0169] Al 2 o 3 Particles: average particle size 0.5μm, purity over 99%
[0170] TiC particles with large particle size: average particle size 3μm, purity over 98%
[0171] TiC particles with small particle size: average particle size 0.6μm, purity over 98%
[0172] The mixing ratio of two kinds of TiC particles, according to the mass W of the large particle size TiC particles 1 and the mass W of small TiC particles 2 ratio of W 1 / W 2 Say, 50 / 50.
[0173] Al 2 o 3 The mixing ratio of the particles and the two types of TiC particles was adjusted so that the total content (mass %) of the two types of TiC particles in the total amount of the three types of particles became...
Embodiment 8、9
[0217] The same shaft 2 and sliding surfaces 2a, 3c of the sleeve 3 as those manufactured in Examples 1 and 7 were mirror-finished, and then put into the drum together with water and abrasive (white corundum) and rotated for 1 hour. Using an atomic force microscope (AFM), the surface shape of the sliding surfaces 2a, 3c subjected to the above-mentioned treatment was measured, and it was found that, as Figure 9 As shown, TiC grains 41, 42, from Al 2 o 3 The defined sliding surfaces 2 a , 3 c protrude from the surface of the crystal grain 40 . The surface shape of the sliding surfaces 2a and 3c before the above treatment was also measured, and as a result, protrusion of TiC crystal grains was not found.
[0218] For the above-mentioned Examples 8 and 9, the same test as above was carried out. The gap G formed between the opposing sliding surfaces 2a, 3c of the shaft 2 and the sleeve 3 23 The interval is set at 4 μm or more and less than 5 μm. Table 4 shows the results of E...
Embodiment 10~12、 comparative example 14
[0223] Assemble the same shaft 2 and flange 4 as those produced in Example 1, and adjust the TiC content and set the difference from the volume intrinsic resistance value of the above-mentioned shaft 2 and flange 4 to the values shown in Table 5. The sleeve 3 made of ceramics with a small volume intrinsic resistance value constitutes the fluid dynamic pressure bearing 1 . Gap G formed between the opposing sliding surfaces 2a, 3c of the shaft 2 and the sleeve 3 23 The interval was set at 2 μm. In addition, the spin test (I) was carried out. Table 5 shows the results of Example 1 together with the aforementioned Examples and Comparative Examples.
[0224] table 5
[0225] Volume intrinsic resistance value
[0226] It can be seen from the table that if the difference between the volume intrinsic resistance values of the ceramics forming the shaft 2 and the ceramics forming the sleeve 3 is set at 10 5 Ω cm or less, the occurrence of spark discharge can be relia...
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