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Strain gauge type sensor and strain gauge type sensor unit using the same

A sensor unit and strain gauge technology, which is applied in the field of strain gauge sensor units, can solve the problems of smaller bridge circuit output and lower sensor sensitivity, etc.

Inactive Publication Date: 2009-01-07
NITTA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the outputs of the bridge circuits 521, 522, and 523 are all reduced, and there is a problem that the sensitivity of the sensors becomes low.

Method used

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  • Strain gauge type sensor and strain gauge type sensor unit using the same
  • Strain gauge type sensor and strain gauge type sensor unit using the same
  • Strain gauge type sensor and strain gauge type sensor unit using the same

Examples

Experimental program
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Embodiment Construction

[0084] Preferred embodiments of the present invention will be described below with reference to the drawings.

[0085] First, refer to figure 1 and figure 2 , and the configuration of the strain gauge sensor 1 according to the first embodiment of the present invention will be described.

[0086] figure 1It is a cross-sectional view of the strain gauge sensor 1 according to the first embodiment of the present invention. The strain gauge type sensor 1 has: a substantially cylindrical force-receiving part 11 provided in the center, a fixing part 12 provided on the periphery, and a substantially annular shape connecting the vicinity of the upper surface of the force-receiving part 11 and the fixing part 12. The strain generating body 10 of the connecting portion 13 ; and the strain gauges R11 to R34 composed of piezoelectric elements attached to the strain generating body 10 . In addition, the upper surface of the force receiving part 11 is on the same plane as the upper su...

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PUM

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Abstract

A strain gauge type sensor and a strain gauge type sensor unit using the sensor are improved in sensitivity. In a strain gauge type sensor 1 for measuring at least one of multiaxial force, moment, acceleration, and angular acceleration, externally applied, diaphragms 15 and 16 different in thickness are formed at inner and outer edges of a substantially disk-shaped interconnecting portion 13 interconnecting a vicinity of an upper end of a force receiving portion 11 and a fixed portion 12 disposed around the force receiving portion 11. The thicknesses of the diaphragms 15 and 16 are determined such that strains at intersections of a straight line extending through an origin O with the diaphragms 15 and 16 are equal to each other. Strain gauges are disposed at the intersections of the straight line extending through the origin O with the diaphragms 15 and 16.

Description

technical field [0001] The present invention relates to a strain gauge sensor capable of measuring at least one of externally applied multiaxial force, moment, acceleration, and angular velocity, and a strain gauge sensor unit using the sensor. Background technique [0002] As a strain gauge sensor, a device that detects force or moment using a semiconductor single crystal substrate is known. In Patent Document 1, such as Figure 16 As shown in FIG. 17 , a strain gauge sensor 500 is described, which has: a substantially cylindrical force-receiving part 511 provided in the center, a fixed part 512 provided around the periphery, and an arc-shaped diaphragm part connecting them. A strain generator 510 at 513 ; strain gauges R511 to R534 composed of piezoelectric elements mounted on the strain generator 510 . [0003] Strain gauges R511 to R534 are respectively provided on the upper surface of the strain generating body 510 . Here, the intersection point of the upper surface o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/22G01P15/12G01P15/18G01L5/16
CPCG01L5/161G01P15/123G01P15/18G01L5/162G01L5/1627G01L1/22
Inventor 森本英夫
Owner NITTA CORP