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Capacitor element and method for trimming a capacitor element

A capacitor element and element technology, applied in the field of monolithic microwave integrated circuit devices, can solve problems such as damage to capacitor element 11

Inactive Publication Date: 2009-01-07
TELEFON AB LM ERICSSON (PUBL)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be clearly seen that due to the soldering / cutting action performed on the pads 18, 19 and air bridge 15 respectively, considerable damage has been done 22, 23 to the air bridge 16, pad 14 and capacitor element 11 respectively ,twenty four

Method used

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  • Capacitor element and method for trimming a capacitor element
  • Capacitor element and method for trimming a capacitor element
  • Capacitor element and method for trimming a capacitor element

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Embodiment Construction

[0015] Referring now to Figures 4 and 6 respectively, there are shown trimmer capacitor elements similar to those shown in Figures 2 and 3, with the same reduced element spacing, but this time the trimmer capacitors are not introduced with separate welding and cutting operations The circuit is either removed from the circuit and a laser shorting process is used instead. This can be seen more clearly by referring to Figures 5 and 7 respectively, which show the main capacitor C 0 , which is connected in series with four trimmer capacitors C T1 、C T2 、C T3 、C T4 in parallel. The trimmer capacitors may each be in the form of a MIM (Metal-Insulator-Metal) and may have equal or unequal capacitance values. When all 4 capacitors are in the circuit, the total capacitance of the structure is minimal because all 4 capacitors are in series. Now assuming that the total capacitance needs to be increased from the lowest value, it is necessary to adjust one of the four trimming capacito...

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PUM

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Abstract

A capacitor element on a chip, e.g., a MMIC chip, includes a main capacitor in parallel with a series configuration of trimming capacitors. The total capacitance value of the parallel arrangement can be increased from its inherently minimum value by applying one or more laser pulses to one or more of the trimming capacitors, such that in each case a short-circuit is produced between the metallization layer to which the pulses are applied and the other metallization layer making up the trimming capacitor.

Description

technical field [0001] The invention relates to a capacitive element in an integrated circuit device and a fine-tuning method for the capacitive element in the integrated circuit device, where the integrated circuit device particularly refers to a monolithic microwave integrated circuit (MMIC) device. Background technique [0002] When developing MMIC devices, it is often the case that the first samples do not meet the required specifications, so the device (chip) needs to be adjusted to improve performance. Of particular concern is the trimming of capacitors, as these components have a significant impact on performance. [0003] The traditional method of trimming capacitors on a chip is to connect or remove small capacitors to or from large capacitors by soldering connections or removing air bridge connections, respectively. This technique requires sufficient space on the chip to safely perform this soldering or removal without damaging surrounding components necessary for...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/08H01L21/02H01G4/255
CPCH01L27/0805H01G4/255
Inventor S·凯恩M·特劳特温M·沙尔纳
Owner TELEFON AB LM ERICSSON (PUBL)