Manufacturing procedure control method and system

A control method and technology of a control system, which are applied in the field of manufacturing process control, can solve the problem of no obvious improvement in process control, and achieve the effects of reducing waiting time and improving process efficiency.
CN100507782CActive Publication Date: 2009-07-01TAIWAN SEMICON MFG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TAIWAN SEMICON MFG CO LTD
Publication Date
2009-07-01

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Abstract

A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.
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Description

technical field

[0001] The present invention relates to a technology related to manufacturing process control, in particular to a process control method for testing in the manufacturing process. Background technique

[0002] Generally, the manufacturing process of WIP materials for semiconductor materials, components, wafers (grains) and other products (here generally referred to as semi-processed materials, WIP (Work In Process)) usually includes several cyclical steps, such as dispatching ( dispatching), transportation (transporting), detection (testing), loading (loading) and processing (processing), etc. Due to the high complexity of the cyclic steps, productivity depends on the degree of automation of the manufacturing process control. For high-tech industries, such as semiconductor product manufacturing plants, manufacturing costs are often quite expensive. Therefore, before the WIP material is loaded into the manufacturing tool (manufacturing tool), it is usually ne...

Claims

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