Manufacturing procedure control method and system

A control method and technology of a control system, which are applied in the field of manufacturing process control, can solve the problem of no obvious improvement in process control, and achieve the effects of reducing waiting time and improving process efficiency.

Active Publication Date: 2009-07-01
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The aforementioned solutions disclosed in US Patent No. 6,351,723 are effective for improving the detection of process equipment, but have no obvious improvement effect on the overall process control

Method used

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  • Manufacturing procedure control method and system
  • Manufacturing procedure control method and system
  • Manufacturing procedure control method and system

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Embodiment Construction

[0020] In order to make the technical features of the present invention easy to understand, different embodiments and examples are proposed in the following disclosure, supplemented by drawings and specific text descriptions, to illustrate the present invention, but not to limit the present invention. If there are any modifications or changes related to the present invention in the described embodiments or examples, which can be naturally deduced by those skilled in the art, the present invention can be modified or changed accordingly to meet different requirements.

[0021] Please refer to figure 1 , figure 1 It is an execution flowchart showing an embodiment of the process control method disclosed in the present invention. As shown in the figure, firstly, the WIP material is detected during the transportation process of the WIP material, as shown in step S10. For example, if the method proposed by the present invention is applied to a semiconductor product manufacturing pl...

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Abstract

A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.

Description

technical field [0001] The present invention relates to a technology related to manufacturing process control, in particular to a process control method for testing in the manufacturing process. Background technique [0002] Generally, the manufacturing process of WIP materials for semiconductor materials, components, wafers (grains) and other products (here generally referred to as semi-processed materials, WIP (Work In Process)) usually includes several cyclical steps, such as dispatching ( dispatching), transportation (transporting), detection (testing), loading (loading) and processing (processing), etc. Due to the high complexity of the cyclic steps, productivity depends on the degree of automation of the manufacturing process control. For high-tech industries, such as semiconductor product manufacturing plants, manufacturing costs are often quite expensive. Therefore, before the WIP material is loaded into the manufacturing tool (manufacturing tool), it is usually ne...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B23/02G06F11/30G06F15/00H01L21/02
CPCG05B2219/37207G06Q10/00G05B2219/45031G05B2219/31458G05B19/4189Y02P90/02
Inventor 廖元利
Owner TAIWAN SEMICON MFG CO LTD
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