Equipment of coating by vaporization
A technology of evaporation and evaporation materials, which is applied in the directions of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., which can solve the problems of affecting the quality of evaporation materials and becoming scorched black, so as to avoid quality and prevent pollution Effect
Inactive Publication Date: 2009-07-22
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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Problems solved by technology
[0005] However, the liner 12 of the prior art is usually only treated with a bevel to form an inverted frustum-shaped opening 124 that matches the air outlet 112 of the crucible. When an evaporation process takes a long time, the evaporated evaporation material particles will Gradually deposited on the inner wall surface of the inverted frustum-shaped opening 124 of the liner 12, when the deposition thickness is too thick, the stress will curl the deposited evaporation material, and after being irradiated by electron beams or electrons, it will become burnt black, or even fall off. into the crucible 11, affecting the quality of the evaporation material
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[0016] The vapor deposition device provided by the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0017] Please also refer to Figure 3 to Figure 5 , The evaporation device 2 provided by the embodiment of the present invention includes an evaporation chamber 10 , an exhaust system 20 and an evaporation material heating source 30 .
[0018] The evaporation chamber 10 includes a crucible 11 , a liner 12 and a carrier 13 for workpieces to be coated. The crucible 11 has an evaporation material accommodating portion 111 and an air outlet 112 at the top. The liner 12 is sleeved on the periphery of the air outlet 112 of the crucible 11 and can be fixed by several screws. The through hole 123 extending from the second surface 122 to the first surface 121, the through hole 123 includes an inverted frustum-shaped opening 124, and the inverted frustum-shaped opening 124 fits on the gas flow outlet 112 of the crucible 11, so ...
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An evaporation device, which includes a crucible for accommodating an evaporation material, and the top of the crucible has an air outlet, and a liner set on the periphery of the crucible air outlet, and the liner has a An opening matched with the gas flow outlet of the crucible, wherein the opening is in the shape of an inverted truncated cone, and the inner wall of the opening has a serrated protrusion structure. The vapor deposition device provided by the invention can prevent contamination of vapor deposition materials.
Description
【Technical field】 [0001] The invention relates to the technical field of evaporation, in particular to an evaporation device. 【Background technique】 [0002] Physical vapor deposition technology can generally be divided into two types: evaporation and sputtering. The common feature of these two technologies is to deposit thin films in a physical way. As far as evaporation is concerned, the principle is to heat the evaporation material by electron beam or energization, so that the evaporation material becomes gaseous or ion state, and deposits on the surface of the workpiece to be plated to form an evaporation material film layer. Evaporation technology is widely used because of its simple film formation process and easy process control, such as reflective film layers on the surface of optical components, gold and silver film layers on the surface of decorative parts, etc. [0003] like figure 1 As shown, the evaporation process needs to be carried out in an evaporation dev...
Claims
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IPC IPC(8): C23C14/24C23C14/56C23C14/30C23C14/26
Inventor 简士哲
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD