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Exhaust gas treatment system

A technology for waste gas treatment and waste gas, which is applied to the treatment of combustion products, combustion methods, and the use of liquid separation agents, etc. It can solve the problems of easy accumulation and blockage of dust particles, affecting equipment use time and human resources, and the failure of the treatment system to process waste gas normally. , to achieve the effect of convenient cleaning of the combustion chamber, saving manpower requirements, and improving the accumulation of dust in the channel

Active Publication Date: 2009-07-22
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, after combustion, a large number of dust particles of different sizes are easily accumulated and blocked in the pipeline of the exhaust gas treatment system, making the treatment system unable to process the exhaust gas normally and causing a shutdown. Therefore, equipment maintenance must be performed at frequent intervals Actions that seriously affect equipment usage time and human resources

Method used

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  • Exhaust gas treatment system

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Embodiment approach

[0027] The invention discloses a waste gas treatment system, which has the effect of improving dust accumulation and blocking in pipelines generated by burning waste gas. By vertically connecting the channel of the combustion gas outlet to a dust collection box, the situation of dust accumulation in the pipeline is greatly reduced or even eliminated, thereby reducing the frequency of equipment cleaning and making it more convenient. In order to make the narration of the present invention more detailed and complete, refer to the following description and cooperate figure 1 icon.

[0028] refer to figure 1 , which shows a configuration diagram of components of an exhaust gas treatment system according to a preferred embodiment of the present invention. The exhaust gas treatment system mainly includes a guide channel 102 , a fluid nozzle 104 and a dust box 106 . An outlet 102b below the guide channel 102 is vertically connected to the dust box 106. A fluid nozzle 104 is provid...

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Abstract

The invention discloses an exhaust gas treatment system, which includes a guiding channel, a fluid nozzle and a dust collecting box. The guide channel is used to guide the combusted exhaust gas, and the fluid nozzle is located in the guide channel to spray fluid to cool the exhaust gas and make dust adhere to the fluid. The dust collecting box communicates vertically with the lower outlet of the guide channel to collect dust and fluid.

Description

technical field [0001] The invention relates to a waste gas treatment system, in particular to a waste gas treatment system suitable for semiconductor manufacturing process or display panel manufacturing process. Background technique [0002] Environmental protection work is the focus of everyone's attention. Whether it is the current environment or the living environment for future generations, environmental protection awareness is the consensus of human beings in the world today. Therefore, relevant laws and regulations have been enacted in various countries, and their own countries also have relevant regulations and standards for exhaust emissions. [0003] In today's high-tech manufacturing fields such as semiconductor, optoelectronic or display panel manufacturing process, it is bound to be accompanied by some waste gas (such as the equipment used in the etching process), in order to deal with the waste gas generated in the process (such as fluorine-containing toxic gas...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F23G7/06F23J3/00B01D47/06
Inventor 侯建州陈正豪胡永祥陈冠字
Owner AU OPTRONICS CORP
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