Exhaust gas treatment system

A technology for waste gas treatment and waste gas, which is applied in the treatment of combustion products, combustion methods, and the use of liquid separators, etc. It can solve the problems of easy accumulation and blockage of dust particles, affecting the use time of equipment and human resources, and the inability of the treatment system to properly handle waste gas. , to facilitate the cleaning of the combustion chamber, save manpower requirements, and improve the effect of dust accumulation in the channel

Active Publication Date: 2006-07-26
AU OPTRONICS CORP
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] However, after combustion, a large number of dust particles of different sizes are easily accumulated and blocked in the pipeline of the exhaust gas treatment system, making the treatment system unable to process the exhaust gas normally and causing a shutdown. Therefore, equipment maintenance must be performed at frequent intervals Actions that seriously affect equipment usage time and human resources

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  • Exhaust gas treatment system

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Embodiment approach

[0027] The invention discloses a waste gas treatment system, which has the effect of improving dust accumulation and blocking in pipelines generated by burning waste gas. By vertically connecting the channel of the combustion gas outlet to a dust collection box, the situation of dust accumulation in the pipeline is greatly reduced or even eliminated, thereby reducing the frequency of equipment cleaning and making it more convenient. In order to make the narration of the present invention more detailed and complete, refer to the following description and cooperate figure 1 icon.

[0028] refer to figure 1 , which shows a configuration diagram of components of an exhaust gas treatment system according to a preferred embodiment of the present invention. The exhaust gas treatment system mainly includes a guide channel 102 , a fluid nozzle 104 and a dust box 106 . An outlet 102b below the guide channel 102 is vertically connected to the dust box 106. A fluid nozzle 104 is provid...

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Abstract

The invention relates to a waste gas treating system, which comprises a guide channel, a fluid nozzle and a dust-collection box. Wherein, the guide channel is used to guide the burnt waste gas; the fluid nozzle is inside the guide channel to spray the fluid to cool the waste gas and adhere the dust on the fluid; and the dust-collection box is vertically connected to the lower outlet of guide channel to collect the dust and fluid.

Description

technical field [0001] The invention relates to a waste gas treatment system, in particular to a waste gas treatment system suitable for semiconductor manufacturing process or display panel manufacturing process. Background technique [0002] Environmental protection work is the focus of everyone's attention. Whether it is the current environment or the living environment for future generations, environmental protection awareness is the consensus of human beings in the world today. Therefore, relevant laws and regulations have been enacted in various countries, and their own countries also have relevant regulations and standards for exhaust emissions. [0003] In today's high-tech manufacturing fields such as semiconductor, optoelectronic or display panel manufacturing process, it is bound to be accompanied by some waste gas (such as the equipment used in the etching process), in order to deal with the waste gas generated in the process (such as fluorine-containing toxic gas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F23G7/06F23J3/00B01D47/06
Inventor 侯建州陈正豪胡永祥陈冠字
Owner AU OPTRONICS CORP
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