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Electronic fine-grained segmentation device and its method

An electronic subdivision and decimal technology, applied in the field of measurement, can solve the problems of nano-positioning control staying in slow displacement and failing to reach high-speed displacement

Active Publication Date: 2009-09-02
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, while pursuing high-displacement analysis, currently commercially available products cannot meet the requirements of high-speed displacement, so that nano-positioning control can only stay in the field of slow displacement

Method used

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  • Electronic fine-grained segmentation device and its method
  • Electronic fine-grained segmentation device and its method

Examples

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Embodiment Construction

[0033] figure 1 A schematic diagram of the structure of the electronic micro-segmentation device of the present invention is shown. Such as figure 1 As shown, the electronic subdivision device 100 includes a decimal counting unit 110 , an integer counting unit 120 and a logic decision unit 130 . The decimal counting unit 110 may further include a sampling circuit 112 a , a sampling circuit 112 b , an analog-to-digital converter 114 a , an analog-to-digital converter 114 b and a decimal calculation module 116 . The integer counting unit 120 may further include a comparison circuit 122 a , a comparison circuit 122 b and an integer counting module 124 .

[0034] The decimal counting unit 110 and the integer counting unit 120 can respectively receive periodic sine wave signals A and B from the sensors 102a and 102b. Here, the periodic sine wave signals A and B will be sine (sin) and cosine (cos) waveform signals as examples, but the actual operation is not limited to this. For ...

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Abstract

An electronic subdivision device and its method are used to calculate a phase displacement θ from the first and second periodic signals as the basis for accumulating spatial displacement distances. The electronic subdivision device includes a decimal counting unit for generating the phase value Φ and the number of cycles N; an integer counting unit for generating the number of cycles M; and a logical decision-making unit for deciding to use the number of cycles N or the number of cycles according to a judgment logic process M to calculate the aforementioned phase shift.

Description

technical field [0001] The present invention relates to a measurement technique, and in particular to an electronic subdivision device and method thereof. Background technique [0002] In recent years, due to the rise of the semiconductor industry and the electronics industry, precision positioning measurement products have been widely used in the manufacturing process and testing equipment of the semiconductor industry and the electronics industry. With the increasing refinement of process technology, smaller line width and more precise process technology Continuously being developed, even down to the nanometer level, precision positioning measurement technology must also be innovated. The electronic interpolation technology has been continuously developed. It achieves the purpose of improving the measurement accuracy and resolution of the sensor by dividing the periodic sine wave signal measured by the sensor. Commercially available electronic subdivision devices with a r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/243G01D5/244
Inventor 黄焕祺张中柱陈誉元
Owner IND TECH RES INST
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