Piezoelectric resonator array and planar three-freedom final motion platform
A piezoelectric vibrator, micro-moving platform technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, fluids utilizing vibration, etc., can solve problems such as complex structures and achieve accurate motion , the effect of improved response speed and simple structure
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specific Embodiment approach 1
[0009] Specific implementation mode one: see Figure 1 to Figure 3 , Figure 8 and Figure 9 , the piezoelectric vibrator array in this specific embodiment is composed of vibrator groups in four orientations of east, south, west and north in the same plane, and the four vibrator groups in the east, south, west and north are respectively composed of a forward strip vibrator B1 It is composed of a reverse strip vibrator B2, the strip vibrators forming the south and north vibrator groups are placed horizontally and arranged in a row, and the strip vibrators forming the east and west vibrator groups are vertically placed and arranged in a row. Both the forward strip vibrator B1 and the reverse strip vibrator B2 are composed of a strip vibrator 2, four piezoelectric ceramic sheets 1 and four sets of shifting tooth groups 3; in each strip vibrator, four The piezoelectric ceramic sheets 1 are arranged adjacent to each other in turn and attached to the lower surface of the bar-shape...
specific Embodiment approach 2
[0010] Specific implementation mode two: see Figure 1 to Figure 3 , Figure 8 and Figure 9 The micro-movement platform with three degrees of freedom in the plane of the piezoelectric vibrator array described in the first embodiment is composed of a bracket 13, a fixed frame, a rolling frame, a support body 6, a loading table 7, a force plate 8, and a friction material layer 9 , a piezoelectric vibrator array 10, a bottom surface support platform 11 and a preloading device 12, the two opposite side walls on the fixed frame are respectively fixedly connected with the bracket 13, and the two opposite side walls on the rolling frame are fixedly connected to each other. Guide rails are provided between the walls, and guide rails are provided between the inner sides of the other two side walls on the rolling frame and the two opposite side walls on the support body 6 , and the guide rails are arranged in the same plane. The loading table 7 is divided into two parts, the upper di...
specific Embodiment approach 3
[0011] Specific implementation mode three: see Figure 4 to Figure 7 The difference between this specific embodiment and the second specific embodiment is that: the bottom support platform 11 is a cross-shaped plate, and the upper surface of the four extended ends of the cross-shaped plate is provided with long grooves 11-2. The depth of the long groove 11-2 is 1.5-2.5 mm, a rectangular groove 11-1 is formed on the upper surface of the central part of the cross-shaped plate, and a protruding shaft 11-1 is formed on the lower surface of the central part of the cross-shaped plate. 3. The grooves on the upper surface of the four extended ends of the cross-shaped plate respectively support the east, south, west and north four vibrator groups of the piezoelectric vibrator array 10, as shown in Figure 7 As shown, the grooves on the upper surface of the four extended ends of the cross-shaped plate are in contact with one side of the ceramic sheet of the forward strip vibrator B1 or...
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