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Method for piezoelectric vibrator

A piezoelectric vibrator and vibrator technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive transducers, piezoelectric devices/electrostrictive devices, etc., can solve performance problems damage, pollution, etc.

Inactive Publication Date: 2009-12-02
SII CRYSTAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] However, in the above method, contamination of foreign matter occurs in the film forming process and laser trimming for adjusting the frequency of the vibrator, so the performance after connection is impaired
[0017] In addition, the resistance value of each short-circuited sputtering film and the layer difference caused by the short-circuiting sputtering film also lead to impairment of performance.

Method used

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  • Method for piezoelectric vibrator
  • Method for piezoelectric vibrator
  • Method for piezoelectric vibrator

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Embodiment Construction

[0030] A method of manufacturing a piezoelectric vibrator according to the present invention is characterized in that the method has the steps of forming the vibrating member and the outer shape of the frame positioned at the periphery of the vibrating member, a step of forming a first excitation electrode at the vibrating member, and forming a first excitation electrode at the vibrating member. A process of forming a counterweight separate from the first excitation electrode, a process of adjusting the performance of the vibrator, a process of removing the first excitation electrode, a process of forming a metal film at the surface of the vibrator, and patterning the metal film and forming The process of the second excitation electrode.

[0031] In addition, the method of manufacturing a piezoelectric vibrator according to the present invention is characterized in that the method has a step of forming the external shape of a plurality of vibrating members and a frame of the vi...

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Abstract

In a method for manufacturing a piezo-electric vibrator, a vibrator is provided having a vibrator piece and a frame surrounding a periphery of the vibrator piece. A first exciting electrode is formed on the vibrator piece. A weight is disposed on the vibrator piece in spaced-apart relation to the first exciting electrode. A characteristic of the vibrator is then adjusted. The first exciting electrode is removed and a metal film is formed on a surface of the vibrator. The metal film is patterned and a second exciting electrode is formed on the vibrator piece.

Description

technical field [0001] The present invention relates to a method of manufacturing a piezoelectric vibrator used in cellular phones, portable information terminals, and the like. Background technique [0002] A conventional piezoelectric vibrator has, for example, a structure including a pair of cover plates and a base body, and this structure has a hollow portion forming a space in which vibration of a piezoelectric vibrating member is not affected at the upper and lower surfaces of the vibrator. For interference, the vibrator is composed of a piezoelectric vibrating member and a frame-shaped portion integrally formed with an end portion of a base of the vibrator. [0003] In mass production of wafer units by forming a plurality of the above-mentioned piezoelectric vibrators on a wafer having a relatively large area, the excitation electrode film and the like formed on each vibrating member are activated by individually exciting the vibrating members. The electrode pattern ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H3/02H01L41/09H01L41/18H01L41/22H01L41/23H01L41/253H01L41/29H01L41/313H01L41/338H03H3/04H03H9/19H04R17/00
CPCH04R17/00H03H3/04H03H2003/0478Y10T29/42Y10T29/49128Y10T29/49005Y10T29/49004Y10T29/49156Y10T29/49155
Inventor 荒武洁白石政良
Owner SII CRYSTAL TECH
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