Coating method and coating device, method for manufacturing parts of display and manufacturing device

Abstract

A sort of coating method used to discharge the air which invades to the inner part of the applicator in the mould-type coating machine and the setting for carrying out the method, a manufacturing method of the monitor part which uses the coating method and the setting for carrying out the method. Utilizing the liquor-supplying device which can supply coating liquor to the applicator, a applicator which have inset of the coating liquor and escapement of the gas and coating liquor, an outset path with a opening and closing valve which is connect to the escapement and is about located at the same or lower location, a waste liquid pot which stores the waste liquid discharged from the gas escapement, a holding device which holds the coated part, and a coating equipment which makes the applicator and holding device do relative movement. The equipment moves the applicator corresponding to the coated parts and supplies the coating liquor to form a coated film on the surface. Before or after the coasted film has come into being, supply the liquor from the liquor-supplying device, and discharge the coating liquor and gas from the mentioned above opening and closing valve at the same time.

Description

technical field [0001] The present invention is used, for example, in the fields of manufacturing color filters for color liquid crystal displays, array substrates, panels for plasma displays, optical color filters, and the like. More specifically, the present invention relates to a coating system capable of effectively discharging the gas intruded into the coater of a die coater (diecoater) that coats the surface of a member to be coated such as a glass substrate. A method and a coating apparatus, and a method and apparatus for manufacturing a member for a display using them. Background technique [0002] A color liquid crystal display composed of a color filter, an array substrate, etc. often includes a manufacturing process of coating a low-viscosity liquid material on the surface of a glass substrate as a member to be coated and drying it to form a coating film. For example, in the manufacturing process of a color filter, a black photoresist coating film is formed on a ...

AI Technical Summary

Problems solved by technology

Therefore, it is extremely difficult in terms of cost to apply the existing system to the very expensive coating liquid for liquid crystal display manufacturing in order to discharge microscopic gas with a diameter of less than 1mm.

In addition, in the existing above-mentioned devices, since there are cases where the fine gas cannot be completely discharged, there are also cases where the fine gas is discharged from the discharge port to the member to be coated, causing coating defects such as fine holes or vertical streaks. Happening

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