The invention belongs to the technical field of
semiconductor equipment, and particularly relates to a buffer for a
photoresist supply pipeline, which comprises a cylinder main body, an upper cover and a lower cover, the upper cover is provided with a waste
discharge duct for communicating with an external waste
discharge pipeline, the lower cover is provided with a liquid inlet and a liquid outlet, the liquid inlet is communicated with an
external liquid inlet pipeline, and the liquid outlet is communicated with a liquid outlet pipeline. And the liquid outlet is communicated with an
external liquid outlet pipeline. The lower cover is provided with an anti-
backflow boss part, an inverted-cone-shaped liquid passing space, a liquid outflow hole and the like, and a blocking ball is arranged in the inverted-cone-shaped liquid passing space. When the
photoresist is filled excessively, the
photoresist can be effectively prevented from flowing back to the liquid inlet pipeline, one-way flow control over the photoresist is automatically achieved, and liquid level detection is prevented from being interfered; and high-pressure gas or redundant photoresist in the inner cavity of the
barrel main body can be reliably discharged, and meanwhile, the air pressure in the inner cavity of the
barrel main body is kept stable, so that the stable operation of the photoresist pump is ensured.