Microelectromechanical microwave powersensor with two balanced thermopiles and its prepn process

A technology of micro-electronic machinery and microwave power, which is applied in electric power measurement by thermal method, generator/motor, piezoelectric/electrostrictive/magnetostrictive device, etc., can solve the problem of inability to directly receive microwave power, etc. Achieve the effect of avoiding heat channeling, ensuring electrical isolation, and reducing the temperature of the cold end

Inactive Publication Date: 2007-10-03
SOUTHEAST UNIV
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Problems solved by technology

Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission l...

Method used

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  • Microelectromechanical microwave powersensor with two balanced thermopiles and its prepn process
  • Microelectromechanical microwave powersensor with two balanced thermopiles and its prepn process
  • Microelectromechanical microwave powersensor with two balanced thermopiles and its prepn process

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Embodiment Construction

[0021] The present invention provides a dual thermopile balanced microwave power sensor based on micro-electromechanical technology, utilizing the thermally balanced and symmetrical structure of the two thermopile, the left end receives power from the first coplanar waveguide transmission line, and the first load resistor absorbs the power The power is converted into heat, and the heat causes the first thermopile placed near the first load resistance to generate a temperature difference. Due to the Seebeck effect, a DC voltage output is generated at the two output terminals of the first thermopile, and the right end passes through the power supply to the right end of the first thermopile. Heating by two load resistors also makes the two output terminals of the second thermopile on the right end generate DC voltage output, and the middle part uses a large-area metal heat sink to achieve the same temperature at the cold end of the two thermopile. When the output voltages of the le...

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Abstract

The balanced microwave power sensor with two thermopiles based on microelectromechanical technology is used in measuring microwave power by means of thermal balance. The microwave power sensor has the first coplane waveguide transmission line to receive the measured microwave signal, the first load resistor to absorb the signal power and convert it into heat and the first thermopile to receive the heat to generate potential difference; the second coplane waveguide transmission line, the first press welded block to output the potential difference, the second load resistor, the second thermopile, the second press welded block in the same structure and action with the first ones; and one power source. Through regulating the power source to make the second press welded block output the same voltage as the first one, the DC power consumed in the second load resistor will be equal to the microwave power, realizing the microwave power measurement.

Description

technical field [0001] The invention proposes a dual thermopile balanced microwave power sensor based on micro-electro-mechanical system (MEMS) technology, which belongs to the field of micro-electro-mechanical systems. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. Microwave power measurement has become an important part of electromagnetic measurement. In the research of microwave signal generation, transmission and reception, etc., microwave power measurement is essential. Traditional power meters use waveguide power sensors, bismuth-antimony as thermocouples, and microwave transmission lines such as coaxial cables as microwave signal input and connection devices, which cannot directly receive microwave power. [0003] With the rapid development of micro-electro-mechanical systems (MEMS) technology, there have been many literatures on MEMS microwave power sensors....

Claims

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Application Information

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IPC IPC(8): G01R21/02B81B7/02
Inventor 廖小平田涛
Owner SOUTHEAST UNIV
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