Multilayer optical disc and method and apparatus for making same
An optical and data layer technology, applied in the manufacture of optical record carriers, recording/reproducing by optical methods, optical record carriers, etc., can solve the problems of complex procedures, high defective rate and low output of optical discs, etc.
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example 1
[0053] Example 1. Sputtering method of diamond-like carbon (DLC) layer. A substrate 10 with a diameter of 120 mm and a thickness of 0.54 mm, made of polycarbonate (polycarbonate) by injection molding and containing data in the form of pits 0.12 μm deep, was placed in a condenser-like plasma-enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition) equipment, which utilizes an embedded thermostat to maintain the temperature at approximately 30°C. Constant temperature of the electrodes is necessary so that the substrate is sputtered without being subject to fluctuating temperatures and overheating (which can lead to non-uniform sputtering). A layer of diamond-like carbon (DLC) was deposited on the substrate under the following conditions: reaction chamber with 1.5 lph acetonitrile vapor, 1 lph argon, 20 Pa vacuum, generator power 500Watt, generator work frequency 400kHz. The sputtering time was 6 minutes. In an industrial environment, the same effect can b...
example 2
[0054] Example 2. Method for producing a plastic master mold. A polycarbonate substrate manufactured by injection molding, containing data in the form of 0.12 μm high small bumps (manufactured using a metal stamper - a "master mold"), was placed in a plasma-enhanced chemical vapor deposition (PEVCD) device for reaction The electrode in the low constant temperature state of the chamber, and then it uses silicon dioxide (SiO 2 ) sputtering for one hour: the reaction chamber has vaporized 0.9lph hexamethyldisilazane (hexamethyldisilazane), 1.0lph argon and 1.5lph oxygen, the pressure of the reaction chamber is 25Pa, and the generator power is 300Watt. The substrate was then treated with liquid dimethyldichlorosilane (dimethyldichloresilane) for 15 seconds, and then the remainder of the latter was removed with isopropyl alcohol. The original model is ready for further use.
example 3
[0055]In the example 3.DVD bonder, the substrate with diamond-like carbon (DLC) (first data layer) sputtered layer similar to example 1 is bonded with the plastic master mold with the second layer of data, produced by example 2. The thickness of the adhesive layer can be set at 35 to 40 μm. After 30 minutes of bonding, the disc is divided into several layers and the data relief of the plastic master mold is transferred to the substrate sputtered with diamond-like carbon (DLC), after which the plastic master mold is released. , the original mold can be used to make the next CD. To remove electrostatic stress, both the substrate and master mold surfaces are cleaned with isopropyl alcohol. On the semi-finished double-layer optical disc made by the method of example 1, carry out sputtering for the second time with diamond-like carbon (DLC), then bond with the plastic master mold that contains the third layer of information with a DVD bonding machine. The disc semi-finished produc...
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