Three-dimensional force integrally assembled type six-dimensional force cell sensor
A force sensor, three-dimensional force technology, applied in the field of six-dimensional force sensor, to achieve the effect of convenient adjustment and installation, simple structure and high precision
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[0014] The specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings. The three-dimensional force integral assembly type six-dimensional force sensor designed by the present invention adopts two groups of three-dimensional force quartz wafer groups arranged up and down to form a six-dimensional force measuring mechanism. Fig. 1 is a three-dimensional integral assembly The front view of the six-dimensional force sensor mainly includes eight piezoelectric three-dimensional force quartz chip groups, wherein each three-dimensional force quartz chip group can measure three mutually perpendicular forces, including a piezoelectric Quartz wafer and two piezoelectric quartz wafers capable of measuring shear, two inner sleeves connected to the manipulator arm, and one outer sleeve connected to each three-dimensional force quartz wafer group. The upper inner sleeve 9 and the lower inner sleeve 1 are respectively instal...
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