Mode-free coupled two-axis deflection flexible support structure
A flexible support and modeless technology, applied in installation, optics, instruments, etc., can solve problems such as large structural size, increased system bandwidth, and restricted system accuracy, and achieve simple structure, convenient installation, and high deflection accuracy.
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[0026] As shown in Figures 6 and 7, the present invention is composed of four trapezoidal flexible boards 1, flexible rods 2, four fixing frames 3, deflection blocks 4, a bottom plate 5, and a motor 6. The four trapezoidal flexible boards 1 are respectively fixed on the four fixing frames 3, the fixing frames 3 are rigidly fixed on the base plate 5, the base plate 5 is fixed on the platform, the stator of the motor 6 is installed on the base plate 5, and the mover is installed on the deflection block 4. The mover exerts force on the deflection block 4 to realize the deflection of the deflection block. The structural dimensions of the trapezoidal flexible board 1: the thickness is 0.2-0.6mm, the short side width of the trapezoidal board is about 4mm, the long side width is about 36mm, and the height is about 40mm. Such four flexible boards 1 are respectively installed in the tangential direction on the side of the deflection block 4, which provides the deflection block 4 with h...
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