The invention provides an electronic device, a
ceramic substrate and a preparation method thereof, and relates to the technical field of semiconductors. The
ceramic substrate comprises a
ceramic base body and a liquid channel layer, the liquid channel layer is arranged in the ceramic base body, the liquid channel layer and the ceramic base body are integrally sintered and formed, the liquid channel layer comprises a liquid channel, the liquid channel is used for containing a
cooling medium, and the liquid channel extends in the ceramic base body along a three-dimensional space path. The preparation method of the
ceramic substrate comprises the following steps: preparing
slurry containing ceramic
powder, preparing a sacrificial template matched with a target liquid channel in shape, pouring the
slurry to coat the sacrificial template, filling a mold with the
slurry to obtain a ceramic blank, removing the sacrificial template to form a hollow channel in the ceramic blank, and
sintering to form the
ceramic substrate with the liquid channel. The electronic device comprises the
ceramic substrate, a component and a liquid cooling circulation
system.