Refraction and reflection projection optical system
A projection optical system, catadioptric technology, applied in the field of projection optical system, can solve the problems of optical processing, optical inspection difficulties, lack of imaging quality data, size design restrictions, etc., achieve long working distance, correct aberrations, and reduce costs Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0035] The catadioptric projection optical system of the present invention will be described in further detail below.
[0036] As shown in Figure 1, the present invention provides a catadioptric projection optical system, the projection optical system is a catadioptric symmetric structure, that is, from the side of the object surface sequentially includes a front (rear) group, provided with an aperture stop Concave spherical mirror M. Among them, under the light reflection of the concave spherical mirror M, the lens components of the front group are the common components of the rear group, that is, the optical structure of the optical elements shared by the front (rear) group is completely symmetrical (surface The radius and interval are equal, and the optical materials are the same), and the magnification is -1. The advantage of the symmetrical structure with a magnification of -1 is that according to the primary aberration theory, its vertical aberrations: coma, distortion, and ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap