Vacuum gate valve having anti-suck back function
A vacuum gate and functional technology, applied in the direction of sliding valves, valve devices, electrical components, etc., can solve problems such as difficult response, reduced production efficiency, and slow response of vacuum gate valves, so as to prevent damage and protect products.
Inactive Publication Date: 2008-07-23
MI
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Problems solved by technology
However, frequent failures of auxiliary equipment such as vacuum pumps not only increase maintenance costs, but also increase equipment downtime, resulting in increased manufacturing costs and decreased production efficiency.
In particular, when a failure or error occurs in the vacuum pump, the response of the vacuum gate valve is slow, that is, a vacuum pump failure signal is output, and the CPU that receives the output signal closes the gate valve. Since the closing operation of the gate valve is performed through these processes, it is difficult to respond quickly.
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[0026] The purpose and advantages of the present invention will be clarified by referring to the preferred embodiments in detail below with reference to the accompanying drawings.
[0027] 1 is a diagram illustrating a state where a valve having an anti-suckback function is provided between a vacuum device and a vacuum pump according to a preferred embodiment of the present invention;
[0028] As shown in FIG. 1 , a vacuum gate valve 300 with anti-suckback function is installed between semiconductor and LCD manufacturing equipment 100 (hereinafter simply referred to as "manufacturing equipment") and a vacuum pump 200, and is used to open and close when maintaining piping, vacuum pumps and other auxiliary equipment. Close line 102. Here, the "anti-suckback function" refers to the following function: when an abnormality occurs in the vacuum pump 200, the opening and closing plate 340 automatically rises vertically according to the pressure difference generated thereby to close t...
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A vacuum gate valve having anti-suck back function is disclosed. A vacuum gate valve includes a base body with the first hollow. A main body is connected to one side of the base body and has the second hollow corresponding to the first hollow. An upper body is connected to other side of the main body opposite to the base body and has the third hollow corresponding to the second hollow of the main body. An opening and closing plate is elevatedly installed at the second hollow of the base body to close the third hollow of the upper body. In case of an error of the vacuum pump, the third hollow of the upper body is closed by the vertically elevated opening-closing plate due to a pressure difference of the first hollow of the base plate and the third hollow of the upper plate. In this structure, a vacuum of manufacturing equinpments, such as a semi-conductor and an high vacuum LCD manufacturing equipment and a general industrial low vacuum manufacturing equipment, can be maintained in case of the error of the vacuum pump.
Description
technical field [0001] The invention relates to a vacuum gate valve, in particular to a vacuum gate valve with anti-suction function (VACUUM GATE VALVE HAVING ANTI-SUCK BACK FUNCTION). Background technique [0002] A vacuum gate valve is installed between the outlet side of the working chamber of the semiconductor and LCD manufacturing equipment and the vacuum pump, and the vacuum gate valve is used to open and close the pipeline when maintaining the piping and the auxiliary equipment such as the vacuum pump. The working mode of the existing vacuum gate valve is divided into manual opening and closing mode and automatic opening and closing mode, and the automatic opening and closing mode includes compressed air mode or electric drive mode. [0003] The vacuum gate valve plays the role of isolating the vacuum chamber or the processing module in the vacuum state from the atmosphere. For example, it is used for wafer transfer device, high vacuum pump line (located between high...
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IPC IPC(8): H01L21/02
CPCF04D19/04F16K3/00H01L21/02
Inventor 孙炳昌
Owner MI