Apparatus and method for stacking precision positioning with piezoelectricity
A precision positioning and piezoelectric stacking technology, which is applied to piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve cost increase, complex structure, limited resolution, etc. problems, to achieve the effect of easy processing and manufacturing, simple structure and small volume
Inactive Publication Date: 2008-08-27
DALIAN UNIV OF TECH
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Problems solved by technology
Theoretically speaking, piezoelectric actuators can obtain infinitely small displacements, but in practical applications, the resolution that piezoelectric ceramics can achieve is limited, because its output accuracy is based on the performance of the drive control power supply. Improving the output accuracy of the actuator requires a double increase in the performance of the drive power supply, resulting in a multiple increase in cost, which restricts the further application of piezoelectric actuators
In addition, the inherent defect of the piezoelectric ceramic actuator is that the hysteresis effect between the output displacement and the control voltage is obvious, and it usually needs to be supplemented by a boost and a hysteresis compensation circuit.
At present, most of the piezoelectric drive power supplies in China are composed of discrete devices, which not only have a complex structure, but also are prone to self-excited oscillation.
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[0010] The specific implementation of the present invention is described in detail in conjunction with the technical scheme and accompanying drawings. The principle of the primary positive piezoelectric effect of the piezoelectric ceramic stack in the precision positioning device is shown in the attached image 3 (II) in the attached image 3 When the circuit of the piezoelectric stack shown in (I) is disconnected and an external force F is applied, the piezoelectric ceramic will inevitably produce an elastic displacement δ under the action of the external force F 1 , at the same time, the piezoelectric ceramic will be polarized due to the primary positive piezoelectric effect, and the generated charge will not be lost on the open piezoelectric ceramic electrode surface, forming a potential displacement D i (1) , which is commonly referred to as the piezoelectric effect, according to the piezoelectric equation:
[0011] S λ = ...
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The invention discloses a piezoelectric stack precise positioning method and a device thereof, belonging to sensing measurement and control technical field and relating to precise positioning methods and positioning devices for actuators. Firstly, a relation curve of external force and output displacement is built up through the calibration to the precise positioning device, and results are recorded through stepwise loading method; the elastic displacements of the external force and a piezoelectric ceramic stack, and the relation curve of the quadratic converse piezoelectric displacement of the piezoelectric stack and the external force are respectively described; afterwards, pretreatment is carried out, and then rough positioning and finally precise positioning are carried. The device adopted in the piezoelectric stack precise positioning method is composed of a pedestal, a piezoelectric ceramic stack, an elastic plate, an adjusting shim, an upper cover and a pre-tightening screw. The device needs no driving source and is highly precise in positioning, simple in structure, low in cost, small in size and is convenient to manufacture, and is applicable for precise positioning in ultra-precision machining field as well as for sub-micron and nano-scale precise compensation in micro-systems.
Description
technical field [0001] The invention belongs to the technical field of sensing measurement and control, and relates to the technical field of a precise positioning method and a positioning device of a micro-actuator. Background technique [0002] Precision positioning technology is a high-tech closely related to many production practices. It has a wide range of applications in ultra-precision machining, precision machinery, semiconductor device manufacturing, electronic product assembly lines, bioengineering and micro / nano electromechanical systems. Micro-actuator technology with high precision, fast response, high displacement resolution and control precision has become an inevitable trend of its development. At present, the driving methods of micro-actuators include: electrostatic drive, electromagnetic drive, piezoelectric drive, thermal expansion drive, magnetostrictive drive, pneumatic drive, electro-hydraulic drive, and shape memory alloy diaphragm drive. Among them, ...
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IPC IPC(8): H02N2/00H10N30/50
Inventor 孙宝元张忠华钱敏张军周喜石银辉
Owner DALIAN UNIV OF TECH