Roller train for conveying thin sheet panel and method for chemical treatment thereby

Abstract

A roller train for transporting thin substrate comprises an upper roller and a lower roller respectively fixed on an upper roller shaft and a lower roller shaft, wherein the upper and the lower rollers can respectively rotate clockwise and anti-clockwise with respect to each other at the same linear velocity for transporting the thin substrate to move towards a direction, and the upper roller comprises a stationary roller and stationary elastic sheets surrounding the outer periphery of the stationary roller. The invention, on the other hand, provides a method for performing chemical treatmentusing the roller train of the thin substrate, including continuously moving the thin substrate along one direction with one or more roller trains for performing continuous wet chemical treatment withthe solution. The roller train can ensure the upper roller to apply a constant force onto the thin substrate under any conditions for performing continuous wet chemical treatment under any conditionseven when the thin substrate breaks away from the lower roller.

Description

technical field [0001] The invention relates to a roller set and a method for chemical treatment thereof, in particular to a roller set for conveying thin substrates and a method for continuous wet chemical treatment of the surface of the thin substrates. Background technique [0002] Wet chemical treatment of the surface of thin substrates is a common industrial operation in the electronics manufacturing industry. The so-called wet chemical treatment refers to the operation process of using chemical solution to etch, deposit thin film or clean the surface of thin substrate. For example, the definition of electronic circuits in the manufacture of printed circuit boards and the cleaning steps of circuit boards are wet chemical processes. Likewise, in the production of solar cells, the texturing and cleaning steps of thin semiconductor silicon substrates are also wet chemical processing operations. [0003] In the early electronic manufacturing industry, the wet chemical tre...

AI Technical Summary

Problems solved by technology

After the thin substrate is detached from the lower roller, due to the uncertainty of the force direction of the floating upper roller, the thin substrate may stagnate in this case, or even reverse, causing the thin substrate to be damaged

[0015] Therefore, the design of the floating upper roller cannot fully solve the existing problems of the fixed roller

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