Method for preparing tantalum doping tin oxide thin film carrier material for gene chip
A gene chip and carrier material technology, which is applied in the field of preparation of tantalum-doped tin oxide thin film carrier materials for gene chips, can solve the problem of poor stability of the biosignal detection sensitivity chip, expensive biosignal detection equipment, difficulty in portability and Miniaturization and other issues to achieve high-sensitivity label-free electrical detection, strong specificity label-free electrical detection, and easy industrial production
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Embodiment 1
[0029] (1) Ta with a purity of 99.99% 2 o 5 and SnO 2 The powder is fully mixed, pressed into a billet under a pressure of 80Mpa, put into a high-temperature sintering furnace and sintered at 1650°C for 3 hours to obtain a tantalum-doped tin oxide sputtering target, in which Ta 2 o 5 The mass percentage (wt.%) is 1%, SnO 2 The mass percentage (wt.%) of the target is 99%, and the size of the target is 60mm in diameter and 6mm in thickness;
[0030] (2) The prepared tantalum-doped tin oxide sputtering target is fully cleaned with analytical pure acetone and deionized water, then placed in an oven, and kept at 120°C for 3 hours to remove surface oil and other impurities;
[0031] (3) Use ordinary slide glass as the film substrate material, fully wash it with analytical pure acetone and deionized water before sputtering, then put it in an oven, and keep it warm at 80°C for 2 hours;
[0032] (4) Install and put the target material and glass slide pretreated in (2) and (3) into...
Embodiment 2
[0038] Except that the composition and preparation parameters of the sputtering target are different from those in Example 1: the Ta with a purity of 99.99% 2 o 5 and SnO 2 The powder is fully mixed, pressed into a billet under a pressure of 80Mpa, put into a high-temperature sintering furnace and sintered at 1600°C for 4 hours to obtain a tantalum-doped tin oxide sputtering target, in which Ta 2 o 5 The mass percentage (wt.%) is 5%, SnO 2 The mass percentage (wt.%) of the target is 95%, and the size of the target is 60mm in diameter and 6mm in thickness;
[0039] All the other processing steps are identical with embodiment 1.
Embodiment 3
[0041] (1) Ta with a purity of 99.99% 2 o 5 and SnO 2 The powder is fully mixed, pressed into a billet under a pressure of 80Mpa, put into a high-temperature sintering furnace and sintered at 1600°C for 4 hours to obtain a tantalum-doped tin oxide sputtering target, in which Ta 2 o 5 The mass percentage (wt.%) is 5%, SnO 2 The mass percentage (wt.%) of the target is 95%, and the size of the target is 60mm in diameter and 6mm in thickness;
[0042] (2) The prepared tantalum-doped tin oxide sputtering target is fully cleaned with analytical pure acetone and deionized water, then placed in an oven, and kept at 140°C for 2 hours to remove surface oil and other impurities;
[0043] (3) Use ordinary glass slides as the film substrate material, fully wash them with analytical pure acetone and deionized water before sputtering, then put them in an oven, and keep them warm at 90°C for 1 hour;
[0044] (4) Install and put the pretreated target material and single crystal silicon (1...
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