Guiding type wind direction and wind velocity sensor

Abstract

The present invention discloses a guiding wind-direction and wind-speed sensor, comprising: an upper cover board, a lower baffle body, a side baffle board, a through hole, a cantilever beam array and a strain sensor; the upper cover board and the side baffle board are produced by utilizing the lithography and the corrosion technologies of the micro-electro-mechanical system (MEMS) technology; the upper cover board and the side baffle board are bonded; the patterns of the lower baffle board, the through hole, the cantilever beam array and the strain sensor are produced on a silicon wafer; the strain sensor is produced by sputtering; the through hole and the cantilever beam array are produced by the corrosion technology; and the two parts of a wind-direction guide component and a wind sensitive component are produced by bonding. The sensor is characterized in that the wind-direction and the wind-speed can be measured simultaneously, the device can be produced to be very small by utilizing the micro-electro-mechanical systems (MEMS) technology, which can be less than 10mm multiplied by 10mm multiplied by 10mm. The sensor can be widely applied in meteorological exploration, environmental monitoring, national defense, transportation and other aspects.

Description

technical field [0001] The invention belongs to sensor technology, relates to micro-electro-mechanical systems (MEMS), in particular to miniature wind sensor technology. Background technique [0002] Wind direction and wind speed are important information parameters in natural environment, production environment, living environment, national defense, transportation, etc. At present, under the background that society pays more and more attention to global environmental protection, living environment safety, and industrial informatization, wind direction and wind speed need to be measured in real time and accurately in a large area. The wind direction and speed sensor refers to the sensor that can measure the wind direction of 0-360° and the wind speed within a certain range. [0003] Traditional wind direction and speed sensors mainly include mechanical wind sensors, microwave imaging wind sensors, laser Doppler anemometers (LDA), and ultrasonic wind sensors. Although among...

AI Technical Summary

Problems solved by technology

[0009] At present, the most widely used miniature wind sensor is the hot wire wind sensor, but its disadvantages are low accuracy, unstable measurement of high wind speed, high power consumption, and simultaneous measurement of wind direction and wind speed; other types of wind sensors such as thermal imaging The wind sensor has disadvantages such as complex algorithm and small measurement range. In order to solve the existing problems in the prior art, the purpose of the present invention is to provide a guided wind direction and wind speed sensor that can simultaneously measure the wind direction and wind speed.

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