3 freedom degrees ultra-precise micro displacement workbench
An ultra-precise, workbench technology, applied in the direction of housings, instruments, instrument parts, etc., can solve the problems of low positioning accuracy and difficult control, and achieve the effect of improving accuracy and reducing error transmission
Inactive Publication Date: 2010-04-14
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology
The positioning accuracy of the platform is low, and since the X-direction movement needs to be transmitted through elastic supports, an error of elastic deformation is introduced, which is difficult to control
Method used
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[0015] The structure and working principle of the present invention are further described below in conjunction with design examples and accompanying drawings. The design can be used as a micro-motion stage in ultra-precision positioning equipment, the strokes in the X and Y directions are not greater than ±1mm, and the adjustment range in the angular direction is less than 0.002rad.
[0016] Such as figure 1 , 2 As shown, the present invention includes the following components: outer frame 1, first to fourth linear motor stators 2, 11, 17, 19, first to fourth linear motor movers 3, 10, 16, 18, inner frame 4, First connecting plate 5, second connecting plate 9, loading platform 6, first plane mirror 7, second plane mirror 8, air bearing support frame 12, annular air bearing 13, circular vacuum preloading suction cup 14, base 15. The first and second circular air bearings 20 , the third and fourth circular air bearings 21 .
[0017] Four circular air bearings 20 are respectiv...
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The invention discloses a three degree of freedom ultraprecise microdrive worktable, wherein the motions of the worktable in X, Y and theta directions are provided by four linear motors vertically arranged on the outer frame and the inner frame of the microdrive worktable; the movers of the linear motors are arranged at the inside of the outer frame, while the stators are arranged at the outside of the inner frame; the vertical support of the outer frame is realized through the four round air bearings arranged at the four corners of the bottom of the outer frame; the vertical support of the inner frame is respectively realized through an annular air bearing and a round vacuum pretightening suction cup; and the position information of the microdrive worktable is measured by a first plane and a second plane vertically arranged on a carrying platform and matched with a laser interferometer. The three degree of freedom ultraprecise microdrive worktable can realize motions of heavy load, great inertia and high precision; the travel of the platform in X and Y directions is 2mm; the angle of rotation of theta is 0.002rad; the positioning precision in X and Y directions reaches to 5nm; andthe precision of the angle of rotation is 0.25 mu rad. The microdrive worktable can be used in equipment such as a mask aligner, an ultraprecise numerically controlled machine tool and a biochip scanner and so on.
Description
technical field [0001] The invention relates to a precision device, specifically a three-degree-of-freedom ultra-precision micro-motion workbench, which can be applied to high-precision system technical fields such as photolithography equipment, precision machine tools, and precision measurement equipment, and can also be used in bioengineering equipment. Background technique [0002] The nano-scale micro-motion worktable provides a precise positioning and fast-moving object-carrying platform for nano-manufacturing and measurement. With the development of ultra-precision machining and measurement equipment such as integrated circuit manufacturing, the demand for nano-scale micro-motion workbench is increasing, and the performance of the workbench is also very high. At present, there are PI, Anord, and Feinmess companies in the international market that can manufacture micro-motion stages. Among them, the micro-motion stage manufactured by PI company is driven by a planar mo...
Claims
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IPC IPC(8): G12B5/00G12B9/08
Inventor 陈学东李小平罗欣曾理湛叶燚玺鲍秀兰姜伟贾文川
Owner HUAZHONG UNIV OF SCI & TECH