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Deposition apparatus

A deposition equipment and line-type technology, applied in the direction of ion implantation plating, coating, electrical components, etc., can solve the problems of increased volume, increased installation cost, increased equipment installation area, etc., to achieve the effect of wide space

Inactive Publication Date: 2008-10-29
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The increase in the bottom area of ​​the vacuum chamber leads to a sharp increase in the cost of vacuum deposition equipment, and increases the installation area of ​​the equipment, thereby increasing the installation cost
Therefore, from the cost point of view, there is an added negative factor
In addition, an increase in the volume of the vacuum chamber increases the time necessary for evacuation, thus tending to reduce production efficiency

Method used

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  • Deposition apparatus
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Embodiment Construction

[0023] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0024] figure 1 is a schematic diagram illustrating an exemplary configuration of a deposition apparatus according to an embodiment of the present invention. The deposition apparatus 1 shown in the figure is used for depositing an organic layer on a substrate 2 to be processed, which is made of, for example, a glass substrate, in manufacturing a display device using, for example, an organic electroluminescence element.

[0025] The deposition apparatus 1 is equipped with an unillustrated vacuum chamber. The vacuum chamber of the deposition apparatus 1 is internally provided with a transfer device (not shown) suitable for transferring a substrate 2 to be processed and a plurality of linear evaporation sources 3 . The conveying device relatively moves the substrate 2 to be processed and the linear evaporation source 3 in the Y direction by moving ...

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Abstract

A deposition apparatus is provided that includes a plurality of line-type evaporation sources provided to be arranged in a predetermined direction; and a movement and support device which supports the plurality of line-type evaporation sources so as to be individually movable in the arrangement direction and / or longitudinal direction of the evaporation sources.

Description

technical field [0001] The present invention generally relates to deposition apparatus for forming thin films on substrates, and in particular to deposition apparatus providing a wired-type evaporation source. Background technique [0002] Among flat-panel display devices, display devices employing organic electroluminescence elements (organic EL elements: EL stands for electroluminescence) have attracted attention in recent years. Display devices employing organic electroluminescent elements (hereinafter, also referred to as "organic EL displays") have advantages such as wide viewing angles and low power consumption, etc., because they are light-emitting displays, ie, they do not require a backlight. [0003] An organic electroluminescent element employed in an organic EL display is generally constructed such that an organic layer made of an organic material is provided between an upper electrode and a lower electrode (anode and cathode). Positive and negative voltages are...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24H05B33/10
CPCC23C14/243C23C14/562C23C14/12H05B33/10C23C14/24H10K71/00
Inventor 西塔明植竹猶基
Owner SONY CORP