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MEMS design optimizing method

An optimization method and a technology for optimizing variables, applied in computing, special data processing applications, instruments, etc., can solve problems such as inability to apply multiple optimization algorithms and long optimization process time

Inactive Publication Date: 2008-12-17
NORTHWESTERN POLYTECHNICAL UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to overcome the shortcomings of the existing MEME design optimization method based on cell library and genetic algorithm, the overall optimization process takes a long time and cannot be applied to multiple optimization algorithms, the present invention proposes a new MEMS design optimization method

Method used

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Embodiment 1

[0046] A design optimization method for a MEMS micro-gyroscope, comprising the following steps:

[0047] 1. Given the MEMS device structure, determine its performance index y to be investigated m (m=1, 2, ...M) and optimization variable x i (i=1, 2, . . . n). In this embodiment, the MEMS micro-gyroscope is used as the design optimization object. Schematic diagram of the structure of the MEMS micro-gyroscope, see figure 2 . The performance index to be investigated is the resonant frequency fx of the drive mode and the resonant frequency fy of the detection mode. The optimization variables are thickness t, beam width w, beam 1 length l 1 , beam 2 length l 2 , beam 3 length l 3 . For a diagram of optimization variables, see image 3 . Optimize variable value range see Figure 4 .

[0048] 2. Based on the cell library, use the basic cell model to construct the system model of the MEMS device. This embodiment is based on the ARCHITECT unit library, using the basic uni...

Embodiment 2

[0064] A design optimization method for a MEMS microresonator, comprising the following steps:

[0065] 1. Given the MEMS device structure, determine its performance index y to be investigated m (m=1, 2, ...M) and optimization variable x i (i=1, 2, . . . n). In this embodiment, the MEMS micro-resonator is used as the design optimization object. Schematic diagram of the structure of the MEMS microresonator see Figure 10 . The performance index to be investigated is to make the resonant frequency fy in the y direction. The optimization variables are horizontal beam length lb, horizontal beam width wb, vertical beam length lt, vertical beam width wt, mass length lsy connected to the electrostatic comb, mass width wsy connected to the electrostatic comb, and middle mass width wsa . For a diagram of optimization variables, see Figure 11 . Optimize variable value range see Figure 12 .

[0066] 2. Based on the cell library, use the basic cell model to construct the syste...

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Abstract

The invention discloses a novel MEMS design and optimization method and belongs to the technology field of MEMS CAD. The method comprises the following steps: constructing a system model of a new MEMS device based on a cell library under the condition that the MEMS device structure, the performance index and the optimized variable thereof to be tested are given; conducting a computer simulation experiment for the system model on the basis of the experimental design; conducting the analysis of regression for simulation experiment results to build the functional relationship between the performance index and the optimized variable; writing mathematical expression of an optimized target and constraint conditions; and optimizing by selecting optimization algorithm and obtaining the optimized result. Compared with the MEME design and optimization method based on the cell library and the genetic algorithm, the method maintains the advantage of realizing quick modeling for the MEMS device, and at the same time, has the advantages of reduced time of the entire optimization process and suitability for different optimization algorithms.

Description

technical field [0001] The invention relates to a MEMS design optimization method, which belongs to the technical field of MEMS CAD. Background technique [0002] The rapid development of MEMS technology needs the support of MEMS CAD technology. MEMS design optimization method is an important issue in the field of MEMSCAD technology, which helps researchers quickly find a satisfactory solution under given constraints and shorten product development time. [0003] Zhou et al. from the University of California, Berkeley proposed a MEME design optimization method based on cell libraries and genetic algorithms in their doctoral thesis "Simulation and synthesis of Micro Electro Mechanical systems" published in 2002. This method decomposes the MEMS device into many common basic units, establishes the model of the basic unit, thereby forming a unit library; connects the basic units in the unit library according to the structural form of the device, and constructs the model of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50
Inventor 何洋姜澄宇苑伟政马炳和霍鹏飞吕湘连
Owner NORTHWESTERN POLYTECHNICAL UNIV
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