Output measuring circuit and measuring method of capacitance differential pressure transducer

A technology of differential pressure sensor and measurement circuit, which is applied to the pressure difference measurement between multiple valves, and uses electric/magnetic devices to transmit the direction of sensing components and measurement devices, which can solve the problem of low sensor output accuracy

Inactive Publication Date: 2008-12-24
ZHEJIANG SUPCON INSTR
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0013] An object of the present invention is to provide an output measurement circuit of a capacitive differential pressure sensor to solve the technical problem of low sensor output accuracy in the prior art
[...

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  • Output measuring circuit and measuring method of capacitance differential pressure transducer
  • Output measuring circuit and measuring method of capacitance differential pressure transducer
  • Output measuring circuit and measuring method of capacitance differential pressure transducer

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Embodiment Construction

[0047] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0048] see figure 2 , which is a structural schematic diagram of the output measurement circuit of the first capacitive differential pressure sensor of the present invention. This measurement circuit is used to measure the sensor output which is proportional to the differential pressure. It includes a switch unit 21 and a capacitance measurement sub-circuit 22, wherein the capacitance measurement sub-circuit 22 includes at least a capacitance-to-digital converter 23, and the capacitance-to-digital converter 23 includes a high-frequency signal output terminal EXC, at least two signal input terminals IN+ and IN -, one end of the measured capacitor C2 corresponding to the negative chamber pressure of the sensor is connected in series with the switch unit 21, and then connected to one signal input terminal IN-, and one end of the measured capacitor C1 corresponding to ...

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Abstract

The invention discloses an output measuring circuit of a capacitance-typed differential pressure sensor. The output measuring circuit comprises a switch unit and a sub capacitance measuring circuit, wherein, the sub capacitance measuring circuit comprises at least a digital capacitance converter that comprises a high-frequency signal output end and at least two signal input ends, one end of a capacitance C2 that is corresponding to negative cavity pressure of the sensor is serially connected with the switch unit and then connected with one of the signal input ends, one end of the other capacitance C1 that is corresponding to positive cavity pressure of the sensor is connected with the other signal input end, and the other ends of the capacitances C1 and C2 are mutually connected and then connected with the high-frequency signal output end. The digital capacitance converter is used for measuring the electric capacity difference Delta C between the measured capacitances C1 and C2 when the switch unit is on and measuring the electric capacity of the single capacitance C1 when the switch unit is off, the electric capacity value of C1 plus C2 is obtained by subtracting two times of the value of C1 with Delta C, and result of Delta C divided by the value of C1 plus C2 is calculated, thus obtaining the sensor output quantity that is proportional to the pressure difference. The invention further provides a corresponding measuring method.

Description

technical field [0001] The invention relates to a sensor signal processing method, in particular to an output measurement circuit in a capacitive differential pressure sensor and a corresponding implementation method. Background technique [0002] When measuring non-electrical quantities by electrical measurement, the measured non-electrical quantities must first be converted into electrical quantities and then input. Usually, the components that convert non-electrical quantities into electrical quantities are called converters; the related conversion devices designed according to the characteristics of different non-electrical quantities are called sensors, and the measured mechanical quantities (such as displacement, force, speed, etc.) are converted into A sensor that changes capacitance is called a capacitive sensor. Capacitive sensors are widely used in the testing of displacement, pressure, flow, liquid level, etc. Accuracy and stability of capacitive sensors are als...

Claims

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Application Information

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IPC IPC(8): G01L13/06G01D5/24
Inventor 丁云李堂忠管军
Owner ZHEJIANG SUPCON INSTR
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