Method for cutting CIF format circular into PG3600 format rectangle

Abstract

The invention relates to the micro-photolithography graph-data format conversion technique field and discloses a method partitioning a CIF format round into a PG3600 format rectangle. The method includes the following steps: the round is approximately regarded as a right n-side shape and the value of the n is calculated and the n is a natural number; the right n-side shape is partitioned into a combination of rectangles and right triangles; the rectangles obtained from partition are maximally integrated into a rectangle; the rectangles on the external right and left parts of the integrated rectangle are vertically integrated into a rectangle strip and the rectangles on the external upper and lower parts of the integrated rectangle are horizontally integrated into a rectangle strip; for the right triangles obtained from partition, a sloping side of the right triangle is taken as a side of a rectangle to make a rectangle to surround the right triangle. With the invention, the partitioning method is simple and realized by programming easily; the difference between the partitioned graph and the original graph is low and the data amount of the partitioned rectangles is little.

Description

technical field [0001] The invention relates to the technical field of microlithography graphic data format conversion, in particular to a method for cutting a circle in CIF format into a rectangle in PG3600 format. Background technique [0002] Since different exposure devices generally use their own dedicated graphic data formats, data format conversion must be performed. At present, the remaining optical exposure systems are still the GCA 3600F pattern generator (GCA 3600F Pattern Generator) and the GCA 3696 step-and-repeat compactor (GCA 3696 Photo-Repeater), which use the PG3600 graphic data format (PG3600 format) Data is stored using rectangles with different angles as the basic unit. [0003] Caltech Intermediate Form (CIF) is one of the commonly used data exchange formats in the photomask manufacturing industry in the world. It uses four graphics as the basic graphics unit: circle, circle, rectangle and line segment with width. Storing data. Because it is written ...

AI Technical Summary

Problems solved by technology

[0008] In view of this, the main purpose of the present invention is to provide a method for cutting CIF format circles into PG3600 format rectangles, to solve the problem of too many overlapping exposure parts in traditional cutting, and to achieve the purpose of improving the exposure speed and exposure quality of the pattern generator

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