Appearance inspecting device for substrate

Abstract

The invention provides a substrate appearance inspection device. detailed appearance inspection of whole surface can be carried out without taking out glass substrate on the product line, accordingly production period is shorten and manufacture equipment is miniaturized. The substrate appearance inspection device (1) has an illumination device (11) generating illumination light for irradiation on surface of substrate (50) on the product line (52); a camera (13) picking-up image of surface of the substrate (50) illuminated by the illumination device (11); and a moving mechanism integrally moving the illumination device (11) and camera (13) in crossed direction of transmission direction of the substrate (50) on the product line (52), the camera (13) is collocated outside of range of light beam of specular reflection light by the substrate (50) surface from the illumination light of the illumination device (11).

Description

technical field [0001] The invention relates to a substrate appearance inspection device. Background technique [0002] Conventionally, there is known a substrate appearance inspection device that visually observes defects or the like generated on a glass substrate when manufacturing FPDs (flat panel displays) such as LCDs (liquid crystal displays). In this way, inspection based on visual inspection is generally also called macroscopic observation. By irradiating a surface light source based on a macroscopic observation unit to the surface of the substrate to be inspected supported on the holder, and using a television camera to capture the reflected light on the surface of the substrate to be inspected changes, so as to perform visual inspection based on macroscopic observation (for example, refer to Patent Document 1 Image 6 ). [0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 10-111253 [0004] However, in the above-mentioned Patent Document 1, in ...

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Problems solved by technology

[0004] However, in the above-mentioned Patent Document 1, in the LCD manufacturing process, in the case of performing the visual inspection by the camera on the glass substrate conveyed on the production line, it is necessary to temporarily take out the glass substrate from the production line for inspection, and there is a problem that the production cannot be shortened. takt time problem

Furthermore, when the visual inspection device is arranged independently of the production line, it requires a space for its arrangement and a mechanism such as a transport robot, and there is also a problem that it is difficult to save space in manufacturing equipment.

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