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Safety conveying method for phosphorus oxychloride

A kind of phosphorus oxychloride and safe technology, applied in the field of safe transportation of phosphorus oxychloride, can solve the problems of on-site operator troubles, frequent replacement of source bottles, etc., to eliminate potential safety hazards, eliminate manual replacement of quartz containers, and facilitate logistics operations Effect

Inactive Publication Date: 2009-02-04
SHANGHAI ZHENGFAN TECH +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the operation of changing bottles requires wearing respirators and chemical protective clothing, and the frequent replacement of source bottles every day has brought a lot of trouble to the on-site operators.

Method used

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  • Safety conveying method for phosphorus oxychloride

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Embodiment

[0022] Such as figure 1 As shown, a safe delivery method of phosphorus oxychloride, the method adopts a new type of safe delivery device for phosphorus oxychloride, the delivery device mainly includes four parts: 19L source bottle container 1, automatic liquid replenishment device 2, drum Bubble device 3, flow control, etc. All containers and valves are specially treated against corrosion to ensure POCl 3 purity.

[0023] The source bottle is cylindrical, with a volume of 19L. It is made of stainless steel SS316L, equipped with two high-purity diaphragm valves for inlet and outlet, and a valve protection rod is installed on the top.

[0024] The automatic replenishment device 2 uses high-purity nitrogen, and POCl 3 The pressure is sent to No. 1 bubbler 31 and No. 2 bubbler 32 near the diffusion furnace 4 . The supply signal is derived from the demand command of the bubbler. The liquid replenishment device can hold two steel cylinders, equipped with an electronic scale, an...

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Abstract

The invention relates to a safe conveying method of Phosphorus Oxychloride. In the method, a novel Phosphorus Oxychlorid conveying device is adopted; the conveying device includes a source bottle, an automatic fluid infusion device, a bubbler and a flow controller. Special embalmment is carried out on all the containers and valves, thus being capable of ensuring the purity of the Phosphorus Oxychlorid. Compared with the prior art, the safe conveying method of Phosphorus Oxychloride has the advantages of convenient, safe and reliable conveying, bringing great convenience to logistic operation, and the like.

Description

technical field [0001] The invention relates to a gas delivery method, in particular to a safe delivery method of phosphorus oxychloride. Background technique [0002] Phosphorus oxychloride (POCl 3 ) is a colorless transparent liquid, which belongs to the liquid phosphorus source and is used for the diffusion doping of N-type semiconductors. Compared with phosphine, POCl 3 It has the advantages of low toxicity, few by-products, simple process control, etc., and is widely used in solar energy, integrated circuit and other industries. [0003] Due to POCl 3 They are highly corrosive, highly oxidizing, highly toxic, and react violently with water. At present, users use quartz bottle containers (0.4-1.5L) and use PFA valves. As a shipping and delivery container. The disadvantages are that the glass container is fragile, frequent bottle changes, dangerous operation, high risk of leakage, high risk of purity, high labor cost, high cost of logistics and environmental protecti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17D1/02F17C1/10F17C13/04F17D3/01F16L9/18
Inventor 李东升
Owner SHANGHAI ZHENGFAN TECH
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