Stacking shape actuator for shearing piezoelectric ceramics

A piezoelectric ceramic and actuator technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, circuits, electrical components, etc., which can solve the problems of limited application scope and small deformation, and achieve good design flexibility , The effect of good rigidity and small displacement resolution

Inactive Publication Date: 2009-03-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In most applications, the longitudinal inverse piezoelectric effect and the transverse inverse piezoelectric effect of piezoelectric ceramics are usually used, but generally the deformation of a single piece of piezoelectric ceramics is very small, so the application

Method used

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  • Stacking shape actuator for shearing piezoelectric ceramics
  • Stacking shape actuator for shearing piezoelectric ceramics
  • Stacking shape actuator for shearing piezoelectric ceramics

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Experimental program
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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0023] see first figure 2 , figure 2 It is a structural schematic diagram of the laminated shear piezoelectric ceramic actuator of the present invention. It can be seen from the figure that the laminated shear piezoelectric ceramic actuator of the present invention is composed of an actuator body 1, an upper end layer 7-1, a lower end layer 7-2, an external input positive electrode port 5 and an external input negative electrode port 6. :

[0024] The structure of the actuator main body 1 is: a plurality of plate-shaped piezoelectric ceramic sheets 3 are alternately stacked together in opposite directions of polarization P, and every two plate-shaped piezoelectric ceramic sheets 3 of the plurality of plate-shaped piezoelectric ceramic sheets 3 The piezoelectric ceramic sheets are alternately embedded with plate-shaped internal positive electrodes 2...

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Abstract

The invention relates to a laminated shearing piezoelectric ceramic actuator, which is composed of an actuator body, an upper end layer, a lower end layer, an external input positive electrode port and an external input negative electrode port. The laminated shearing piezoelectric ceramic actuator is characterized in that: according to the converse piezoelectric effect principle in shearing piezoelectric ceramic, the piezoelectric ceramic flakes with opposite polarization directions are staggered and cemented or sintered; the corresponding layers of the piezoelectric ceramic flakes are arranged through a binary method, to form an external input electric port; while the external electric field is changed, the actuator can be driven by a digital mode to bring about corresponding transformations. The laminated shearing piezoelectric ceramic actuator has bright application prospect for the optical engineering, precision machine, national defense science and technology, and the like.

Description

technical field [0001] The invention relates to a piezoelectric ceramic actuator, in particular to a laminated shear piezoelectric ceramic actuator and its driving method. Background technique [0002] Piezoelectric ceramic actuator is an electromechanical coupling element, because of its small size (several cubic millimeters to tens of cubic millimeters), high displacement resolution (nanoscale), fast response speed (tens of microseconds), and large output force , high energy conversion efficiency and other advantages, it is an ideal driving element in the current micro-displacement technology, and is widely used in optical precision engineering, micro-electro-mechanical systems, nano-manufacturing technology, micro-electronics technology, nano-biological engineering and other fields. [0003] Piezoelectric ceramic actuators use the inverse piezoelectric effect of piezoelectric materials to apply a certain electric field to achieve the output of deformation and displacement...

Claims

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Application Information

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IPC IPC(8): H01L41/083
Inventor 王斌王勇朱健强
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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