Stacking shape actuator for shearing piezoelectric ceramics

Abstract

The invention relates to a laminated shearing piezoelectric ceramic actuator, which is composed of an actuator body, an upper end layer, a lower end layer, an external input positive electrode port and an external input negative electrode port. The laminated shearing piezoelectric ceramic actuator is characterized in that: according to the converse piezoelectric effect principle in shearing piezoelectric ceramic, the piezoelectric ceramic flakes with opposite polarization directions are staggered and cemented or sintered; the corresponding layers of the piezoelectric ceramic flakes are arranged through a binary method, to form an external input electric port; while the external electric field is changed, the actuator can be driven by a digital mode to bring about corresponding transformations. The laminated shearing piezoelectric ceramic actuator has bright application prospect for the optical engineering, precision machine, national defense science and technology, and the like.

Description

technical field [0001] The invention relates to a piezoelectric ceramic actuator, in particular to a laminated shear piezoelectric ceramic actuator and its driving method. Background technique [0002] Piezoelectric ceramic actuator is an electromechanical coupling element, because of its small size (several cubic millimeters to tens of cubic millimeters), high displacement resolution (nanoscale), fast response speed (tens of microseconds), and large output force , high energy conversion efficiency and other advantages, it is an ideal driving element in the current micro-displacement technology, and is widely used in optical precision engineering, micro-electro-mechanical systems, nano-manufacturing technology, micro-electronics technology, nano-biological engineering and other fields. [0003] Piezoelectric ceramic actuators use the inverse piezoelectric effect of piezoelectric materials to apply a certain electric field to achieve the output of deformation and displacement...

AI Technical Summary

Problems solved by technology

In most applications, the longitudinal inverse piezoelectric effect and the transverse inverse piezoelectric effect of piezoelectric ceramics are usually used, but generally the deformation of a single piece of piezoelectric ceramics is very small, so the application range is limited to a certain extent. In order to obtain a large deformation Often, several or more piezoelectric ceramic substrates are mechanically connected in series, connected in parallel on the circuit, and then bonded or sintered to make a laminated actuator.

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