Miniature molecular pump utilizing leaf disc rotor

Abstract

The invention relates to the improvement of the rotor structure of a small molecular pump and enables the top face of a rotor to increase layers of moving blades (usually 1-3 layers) from the inside to the outside, which take the shape of radial upwards and being vertical to top surfaces and is shown as the following graph structure: the part provided with a spiral groove is a Holweck rotor which rotates at a high speed; on the top of the Holweck rotor, a first stage moving blade has the smallest radius, a third stage moving blade has the largest radius, and a second stage moving blade is in the middle. Part of the third stage moving blade is vertical to the top surface in the internal part thereof; part of the third stage moving blade extends out of the top surface and is a cantilever structure. The part of the moving blade which extends outside extends downwards, with the extending height larger than the moving blade in the internal part of the top surface; the blade on a tectum static blade disc is a second stage static blade and is turned over for being inserted among the rotor blades, thereby forming a fifth stage pumping structure so as to improve the pumping speed of molecular pumps.

Description

Technical field: [0001] The invention relates to the fields of vacuum acquisition and gas flow, uses a blisk rotor to improve the space utilization rate of the rotor structure, and simultaneously takes into account the reliability, pumping speed and compression ratio of the molecular pump. Background technique: [0002] Molecular pump is a kind of ultra-high vacuum equipment, mainly used to obtain 10 -3 Clean vacuum within Pa was mainly used in the field of scientific research in the past. With the rapid development of vacuum applications, molecular pumps are more and more used in industrial fields, and industrial fields generally require molecular pumps to have a higher pumping speed or a higher compression ratio, so that the outlet pressure of the front stage of the molecular pump work at higher levels. There are two kinds of structures used in existing small molecular pumps: 1. The upper part is a blade structure with several stages (generally 6-8 stages), the lower par...

AI Technical Summary

Problems solved by technology

Of these two structures, the former structure can guarantee the pumping speed and compression ratio, but due to the high speed, the reliability of the product is greatly reduced; the latter structure can guarantee the compression ratio and reliability, but due to the lack of blade structure, only The pumping speed is small due to the drag of the light tube

Therefore, the existing two structures cannot simultaneously meet the three important indicators of molecular pumps: reliability, pumping speed and compression ratio.

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