Temperature compensation rod and method for manufacturing multiplexing and de-multiplexing non-heat array wave guide grating

Abstract

The invention discloses a temperature compensation rod and a method for making an athermal array waveguide grating (AWG) for multiplexing and demultiplexing. The temperature compensation rod consists of a rod body and two I-shaped structures respectively formed on two ends of the rod body, clearance is formed between the upper end structure of the I-shaped structure at one side of the rod body and the rod body while the lower end structure of the I-shaped structure is integrated with the rod body into a whole; the upper end structure of the I-shaped structure at the other side of the rod body is integrated with the rod body into a whole while clearance is formed between the lower end structure of the I-shaped structure and the rod body. The method comprises the following steps: coupling two AWGs on a chip; cutting the chip into three parts along cut lines; fixing a third part and respectively arranging a first part and a second part on a 6D precision fine turning frame so as to realize coupling alignment and restore the parts to the original shapes for online testing; carrying out the online testing after arranging the temperature compensation rod; and curing two temperature compensation rods on positions at which the two rods are arranged on the three parts of the chip if the three parts are tested qualified. The temperature compensation rod has the advantages of lower cost, large batch, good repeatability, smaller size, good stability and extremely simple process.

Description

technical field [0001] The invention relates to a temperature-insensitive arrayed waveguide grating. In particular, it relates to a temperature compensation rod and a temperature compensation rod used in optical communication WDM systems to realize multiplexing or (and) demultiplexing functions, especially for devices or subsystems with both multiplexing modules and demultiplexing modules. Athermal arrayed waveguide grating method for fabricating multiplexing and demultiplexing. Background technique [0002] Ordinary AWG (Arrayed Waveguide Grating) is made of silicon-based silicon dioxide technology. The refractive index of silicon dioxide changes with temperature, and the size of the waveguide also changes with temperature, resulting in the AWG's various channels. The wavelength changes with the temperature. Usually, the temperature change of the central wavelength of this type of device is 0.011nm / ℃, but the communication system requires the wavelength of the optical sign...

AI Technical Summary

Problems solved by technology

[0003] In order to improve the efficiency of chip research and development and reduce the cost of chip development, such as figure 1 As shown, one chip contains two AWGs, but due to the difference in material growth and waveguide manufacturing process errors, the operating temperature points of the two AWGs are different. Therefore, the AWG module with a temperature control circuit can only use these two AWGs. One of the AWG; in addition, because an AWG module can only realize the multiplexing function or the demultiplexing function, and cannot realize the multiplexing and demultiplexing functions at the same time, it is currently used in VMUX, OADM (ROADM) and OXC In other devices, two identical AWG modules need to be used, one for multiplexing and the other for demultiplexing, which leads to the disadvantages of high cost and large size of the device

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