Zinc oxide doped air-sensitive film preparation method

A technology of doping gas and zinc oxide, applied in measuring devices, instruments, material analysis by electromagnetic means, etc., to achieve the effects of stable structure, improved stability and accurate thickness

Inactive Publication Date: 2009-05-06
SHANGHAI UNIV OF ENG SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Zinc oxide is a surface-controlled gas-sensing material. Compared with sintered and thick films, the thin-film structure has obvious advantages

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] On the FJL560D2 three-chamber ultra-high vacuum magnetron and ion beam multifunctional sputtering coating equipment, the tubular alumina ceramic tube is used as the base, and the rotating coating auxiliary device is used to keep it rotating at a constant speed. The rotation speed is 40 revolutions per minute and the purity is 99.99 % metal zinc target, the background vacuum is less than 4.0×10-4Pa, the sputtering gas is high-purity argon, the sputtering pressure is 0.5Pa, the sputtering power is 40W, the DC magnetron sputtering is 10min, and the deposited film is transferred to the air resistance furnace Oxidize at 400°C for 60 minutes to obtain a zinc oxide film. Using a static gas sensor test device, the side-heated gas sensor made of the obtained zinc oxide film can accurately monitor 5ppm of absolute ethanol when the heating power is 1.6W. .

Embodiment 2

[0017] On the FJL560D2 three-chamber ultra-high vacuum magnetron and ion beam multifunctional sputtering coating equipment, the tubular alumina ceramic tube is used as the base, and the rotating coating auxiliary device is used to keep it rotating at a constant speed. The rotation speed is 40 revolutions per minute and the purity is 99.99 % metal zinc as the target matrix, and three pieces of pure metal indium with a purity of 99.9% are evenly distributed in the sputtering etching area to form a composite target. The background vacuum is less than 4.0×10-4Pa, and the sputtering gas is high-purity argon , sputtering pressure 0.5Pa, sputtering power 40W, DC magnetron sputtering 80min, transfer the deposited film to an air resistance furnace and oxidize it at 800°C for 10 minutes to obtain a zinc oxide doped film, using a static gas sensor test device, with A side-heated gas sensor made of zinc oxide film was obtained, which can accurately monitor 5ppm absolute ethanol when the he...

Embodiment 3

[0019] On the FJL560D2 three-chamber ultra-high vacuum magnetron and ion beam multifunctional sputtering coating equipment, the tubular alumina ceramic tube is used as the base, and the rotating coating auxiliary device is used to keep it rotating at a constant speed. The rotation speed is 40 revolutions per minute and the purity is 99.99 % metal zinc as the target matrix, and three pieces of titanium oxide with a content of 99.9% are evenly distributed in the sputtering etching area to form a composite target. The background vacuum is less than 4.0×10-4Pa, and the sputtering gas is high-purity argon. The sputtering pressure was 0.5Pa, the sputtering power was 40W, and the radio frequency magnetron sputtering was performed for 10 minutes. The deposited film was transferred to an air resistance furnace and oxidized at 1000°C for 5 minutes to obtain a zinc oxide doped film.

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PUM

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Abstract

The invention belongs to the technical field of magnetic control sputtering depositing air-sensitive films, particularly relates to a preparation method of mixing zinc oxide with air-sensitive films. Metal zinc is used as a target material in a super-high vacuum magnetic control sputtering coating device or the metal zinc is used as a base material of a target material and independent block-shaped oxide or independent block-shaped simple-substance metal to be mixed is uniformly distributed in a composite target material formed sputtering etching areas to be used as a target material. A pipe-shaped insulating material or a plate-shaped insulating material is used as a substrate, and the substrate is controlled to rotate at a constant speed to carry out magnetic control sputtering depositing film; then heat oxidizing treatment is carried out to obtain an air-sensitive film. Compared with the prior art, the invention has the advantages of simple technology, precise film thickness of the prepared air-sensitive film, uniform ingredients, stable structure and high productive efficiency, and the prepared air-sensitive film has the advantages of precise thickness, uniform ingredients, stable structure and high productive efficiency.

Description

[technical field] [0001] The invention belongs to the technical field of magnetron sputtering deposition of gas-sensitive thin films, in particular to a preparation method of zinc oxide-doped gas-sensitive thin films. [technical background] [0002] Zinc oxide is a surface-controlled gas-sensing material. Compared with sintered and thick films, the thin-film structure has obvious advantages in gas-sensing performance, but there are still many problems in the control of film thickness, stable film structure, and doping uniformity. question. [0003] Magnetron sputtering uses a magnetic field to confine and extend the movement path of electrons, change the direction of movement of electrons, effectively use the energy of electrons, increase the ionization rate of the working gas argon, and then increase the sputtering rate of the target. The characteristics of the film can prepare a film with accurate and controllable composition and thickness. Therefore, using magnetron spu...

Claims

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Application Information

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IPC IPC(8): G01N27/12G01N27/00
Inventor 刘延辉周细应何佳
Owner SHANGHAI UNIV OF ENG SCI
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