Processing apparatus

Abstract

Disclosed is a processing apparatus including a processing portion, an actuator, a casing, a preload mechanism, a force sensor, and a detection unit. The processing portion includes a cutting edge. The actuator is configured to cause the processing portion to vibrate microscopically. The casing is configured to accommodate the actuator. The preload mechanism is disposed inside the casing and configured to impart a preload to the actuator. The force sensor is disposed between the cutting edge and the preload mechanism. The detection unit detects a cutting force of the processing portion based on an output of the force sensor. The invention can detect cutting force as well as form miniature or complicated three-dimensional pattern with high precision.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS The present application contains subject matter related to Japanese Patent Application JP 2007-324022 filed in the Japan Patent Office on Dec. 14, 2007, the entire content of which is hereby incorporated by reference. technical field The present invention relates to a machining apparatus for forming micropatterns on the surface of a workpiece to be machined. Background technique In recent years, techniques for forming micro-patterns on the surface of workpieces have become the backbone of the information industry because they can regenerate functional surfaces. For example, Fresnel lenses, microprisms and microlens arrays exhibit optical functions and are thus widely used in the information industry. For example, by forming a three-dimensional micropattern on the surface of a workpiece and distributing the three-dimensional micropattern on the structure of the display portion of an FPD (Flat Panel Display), it is possible to provid...

AI Technical Summary

Problems solved by technology

Therefore, machining monitoring of the cutting force of the tool becomes possible