Support table body with heater in crystal growth furnace

Abstract

The invention discloses a support table body provided with a heater in a crystallizing furnace, and the support table is provided with a plurality of support pillars electrically connected to the electric heater and supporting the above table board; wherein, each support pillar is correspondingly thread-locked at the nut base of a metal electrode pillar by a graphite electrode pillar thereof, and the metal electrode pillar is fixed at the furnace wall by a fixed seat; fixing flange of the fixed seat is welded at the furnace wall in advance, and the fixed seat is internally equipped with an elastic gasket for adjusting each support pillar to evenly apply force to the support table. In the invention, plural support pillars are employed to distribute the weight of the support table body and fix the table body at the furnace wall of the crystallizing furnace firmly, so that the table body is unlikely to topple, so that accidents are avoided; moreover, the table board can be made thinner, which is beneficial for direct and uniform heat transfer into a crucible when heating and for silicon serosity to evenly crystallize when radiating.

Description

technical field [0001] The invention relates to a supporting table body, in particular to a supporting table body suitable for a crystal growth furnace with a heater. Background technique [0002] see figure 1 , which is shown as a known crystal growth furnace 9, as shown in the figure, the heating chamber 90 is arranged in the crystal growth furnace 9, and a table 91 and a crucible 92 are arranged in the heating chamber 90, and silicon materials are filled in the crucible 92 . The support column 93 is fixed on the furnace bottom cover 94 of the crystal growth furnace 9 and supported under the table 91 and the crucible 92 . [0003] In the known crystal growth furnace 9 , in order to consider that the table 91 can be installed in the crystal growth furnace 9 in a balanced manner, some general-purpose crystal growth furnaces use three support columns 93 to achieve balance. In order to effectively support the crucible 92 with three support columns 93, the table board 91 is ...

AI Technical Summary

Problems solved by technology

When heating, the heat capacity of the table 91 is large, and it needs to absorb a large amount of heat to gradually reach the set temperature to completely melt the silicon material into a slurry; Uneven cooling of the slurry above and below causes stress inside the solidified crystal anchor, resulting in poor product quality

[0005] Furthermore, if the silicon slurry leaks out from the small cracks in the crucible 92, the molten silicon slurry will erode one of the supporting pillars 93 under the condition of continuous accumulation, causing cracks, causing the crucible 92 to fall when it breaks, and finally a safety accident will occur.

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