Extensive angle measuring method for inclination angle of plane moving mirror in Fourier spectrometer

A spectrometer and Fourier technology, applied in the field of tilt angle measurement of moving mirrors with plane mirror structures, can solve problems such as difficult systems and unclear direction information

Active Publication Date: 2009-09-02
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

This detection method has high precision, but it needs the direction signal of the moving mirror. When the moving mirror is in the turning area, because the direction information is not cle

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  • Extensive angle measuring method for inclination angle of plane moving mirror in Fourier spectrometer
  • Extensive angle measuring method for inclination angle of plane moving mirror in Fourier spectrometer
  • Extensive angle measuring method for inclination angle of plane moving mirror in Fourier spectrometer

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Embodiment Construction

[0050] A design example is given below:

[0051] In the spatial Fourier infrared interference spectrometer, the reference laser uses a semiconductor laser with a wavelength of 976nm, and the moving mirror moves at a constant speed of 0.73cm / s. The speed change in the acceleration phase conforms to the sine law, and the speed change in the deceleration phase conforms to the cosine law. Therefore, the reference The maximum frequency value of the laser signal is about 15kHz. According to the principle that the AD sampling frequency should be large enough to ensure the solution accuracy, the AD sampling frequency is determined to be 1M. At this time, the peak sampling error is within 0.001. At the same time, set the initial inclination angle of the moving mirror Δ θ ' is 0, and the threshold is set to π. Use Δ θ Explain the degree of inclination of the moving mirror. When there is no external interference, there is an initial fixed angle of -0.65 radians during the scanning proce...

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Abstract

The invention discloses an extensive angle measuring method for an inclination angle of a plane moving mirror in a Fourier spectrometer, which is used in the Fourier spectrometer of which moving mirror is a plane mirror, and provides accurate feedback quantity for dynamic calibration control. By inverting the phase delay of each reference laser detection element signal in real time, the method measures the inclination angle of the moving mirror. The method comprises: continuously and synchronously triggering and sampling two pairs of orthogonal signals Ia and Ia' and Ib and Ib' at high speed, and calculating the orthogonal signals to acquire a real-time direct current component parameter and an alternating current component amplitude parameter as a digital filter value parameter and a normalized parameter; sampling and normalizing the digital filter value of the signals to obtain two points (Ia', Ia'') and (Ib', Ib'') on a unit circle; calculating the phases of the two points, and limiting the phases within [0, 2phi) so as to obtain a phase difference; adjusting the phase difference by reasonably setting a threshold value; and finally calculating the inclination amount of the moving mirror according to the relation of the phase difference and the inclination angle of the moving mirror. The method can achieve overall high-precision extensive measurement of the inclination angle of the moving mirror.

Description

technical field [0001] The invention relates to an optical measurement technology, in particular to a large-range angle measurement method for the inclination angle of a plane moving mirror in a Fourier spectrometer, which is suitable for measuring the inclination angle of a plane mirror structure moving mirror in a Fourier spectrometer. Background technique [0002] Fourier transform spectrometer has the advantages of multi-channel, high luminous flux, high spectral resolution and high spectral accuracy. As a high-precision instrument, its performance is restricted by many factors. For moving mirror Fourier spectrometers with flat mirror structure, the collimation of the moving mirror is one of the main restrictive factors. Theoretical analysis shows that the inclination angle of the moving mirror will significantly reduce the spectral quality (see "Analysis of the Error Tolerance of the Inclination Error of the Moving Mirror in the Interferometric Spectrometer", Xiang Lib...

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Application Information

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IPC IPC(8): G01B11/26G01J3/45
Inventor 魏焕东华建文代作晓王战虎李宁刚
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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