Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Thin film magnetic sensor

A magnetic sensor and thin-film technology, applied in the field of thin-film magnetic sensors, can solve the problems of difficult magnetic field measurement and low magnetic field sensitivity

Inactive Publication Date: 2009-09-02
DAIDO STEEL CO LTD
View PDF0 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] However, the problem with metal-insulator-based nanoparticle materials is that at low magnetic fields, the sensitivity to magnetic fields is very low
However, using both types of sensors is not preferred
This is because more than twice the installation space is required, which makes magnetic field measurement in minute areas difficult

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Thin film magnetic sensor
  • Thin film magnetic sensor
  • Thin film magnetic sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0101] manufacture figure 1 The thin film magnetic sensor 10 is shown, and the MR characteristics are evaluated. FeCo-MgF 2 Nanoparticle alloys are used for GMR films12, the (Co 94 Fe 6 ) 70 Si 15 B 15 Amorphous alloys are used for thin film yokes 14,14.

[0102] In addition, the dimension of each part of the film yoke 14, 14 is as follows.

[0103] Overall length L of film yoke 14, 14 1 ×Width W of the longitudinal bar 1 : 150 μm × 20 μm.

[0104] The length L of the transverse rod 2 ×Width W of lateral bar 2 : 20 μm × 150 μm.

[0105] Figure 4 The MR characteristics of the obtained thin film magnetic sensor are shown. From Figure 4 It can be seen that the slope of the low magnetic field region of |H|≤10(Oe) is large, and the slope of the high magnetic field region of |H|>10(Oe) is small. This indicates that a low-field magnetic region in a magnetic field can be measured with high precision and a high-field magnetic region in a magnetic field can be measured...

Embodiment 2

[0107] manufacture figure 2 The thin film magnetic sensor 20 is shown, and the MR characteristics are evaluated. FeCo-MgF 2 Nanoparticle alloys are used for GMR films22, the (Co 94 Fe 6 ) 70 Si 15 B 15 Amorphous alloys are used for thin film yokes 24,24.

[0108] In addition, the dimension of each part of the film yoke 24,24 is as follows.

[0109] Overall length L of film yoke 24, 24 1 ×Width W of the vertically long part 1 : 150 μm × 10 μm.

[0110] The length L of the horizontal long part 2 ×Width W of the horizontal long part 2 : 15 μm × 20 μm.

[0111] Cut length L 3 ×Slit width W 3 : 5 μm × 1 μm.

[0112] Figure 5 The MR characteristics of the obtained thin film magnetic sensor are shown. From Figure 5 It can be seen that the slope of the low magnetic field region of |H|≤5(Oe) is large, and the slope of the high magnetic field region of |H|>5(Oe) is small. This indicates that a low-field magnetic region in a magnetic field can be measured with high ...

Embodiment 3

[0114] manufacture image 3 The thin film magnetic sensor 30 is shown, and the MR characteristics are evaluated. FeCo-MgF 2 Nanoparticle alloy is used for GMR film 32, the (Co 94 Fe 6 ) 70 Si 15 B 15 An amorphous alloy is used for the thin film yokes 34,34.

[0115] In addition, the dimension of each part of the film yoke 34,34 is as follows.

[0116] Overall length L of film yoke 34, 34 1 ×Width W of the vertically long part 1 : 150 μm × 20 μm.

[0117] The length L of the horizontal long part 2 ×Width W of the horizontal long part 2 : 40 μm × 100 μm.

[0118] Figure 6 The MR characteristics of the obtained thin film magnetic sensor are shown. From Figure 6 It can be seen that the slope of the low magnetic field region of |H|≤5(Oe) is large, and the slope of the high magnetic field region of |H|>5(Oe) is small. This indicates that a low magnetic field region in a magnetic field can be measured with high precision and a high magnetic field region in a magneti...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

The thin film magnetic sensor comprising a GMR film having a Giant Magneto-Resistance effect; and thin film yokes formed of a soft magnetic material connected electrically to both ends of the GMR film; wherein the thin film yoke has a high sensitivity portion with a demagnetizing factor of NL in a magnetic sensitive direction, and a low sensitivity portion with a demagnetizing factor of NH(>NL) in the magnetic sensitive direction, the low sensitivity portion being connected electrically in series with the high sensitivity portion.

Description

technical field [0001] The invention relates to a thin film magnetic sensor. More specifically, the present invention relates to a device suitable for detecting rotation information such as automobile axles, rotary encoders, and industrial gears; information; suitable for detecting current information such as an arc current of an industrial welding robot; and a thin-film magnetic sensor suitable for a geometric direction compass. Background technique [0002] A magnetic sensor is a detection quantity of electromagnetic force such as current, voltage, electric power, magnetic field or magnetic flux by means of a magnetic field; such as position, speed, acceleration, displacement, distance, tension, pressure, torque, temperature or humidity. Quantity detection; and the electronic device that converts the detection quantity of biochemical quantity into voltage. Magnetic sensors are classified into Hall sensors, Anisotropic Magneto-Resistance (AMR) sensors, Giant Magneto-Resis...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09H01F10/32H10N50/10
CPCG01R33/09
Inventor 小山惠史
Owner DAIDO STEEL CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com