Laser direct rendering apparatus
A technology of laser directing and laser beam, which is applied in the direction of optics, optomechanical equipment, photoplate making process of pattern surface, etc., and can solve the problems that the laser beam cannot be adjusted and the predetermined accuracy cannot be obtained.
Inactive Publication Date: 2009-09-09
ADTEC ENG
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Problems solved by technology
[0010] As described above, conventionally, the adjustment is performed by rotating the entire optical system on which the DMD is mounted, or by rotating the stage on which the substrate is mounted. precision problem
In order to solve this problem, the following method is also disclosed (Document 5): setting two wedge-shaped prisms, adjusting the thickness and inclination angle of the two prisms, thereby aligning the focus of the light beam (z direction) and the positions in the x and y directions Individually adjusted, however, cannot adjust the spacing of the laser beams with sufficient precision
Method used
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[0027] figure 1 This is an example of applying the laser direct drawing apparatus of the present invention to the manufacture of printed wiring boards. It is configured such that the substrate W is placed on the stage 60, the stage 60 is moved at a constant speed in the y direction by the stage control device 53, and at the same time, the position of the stage 60 is detected by a sensor (not shown). Read the wiring pattern corresponding to the position of the stage 60, connect the elements corresponding to the pattern of the DMD7 by the DMD control device 52, and directly expose the wiring pattern of the wiring pattern storage device 51 on the photoresist on the stage 60 .
[0028] The wiring pattern of the wiring pattern storage device 51 is generated based on the wiring data in the exposure preparation stage. Specifically, wiring data written in vector data is converted into bitmap data as two-dimensional image data, and stored as a wiring pattern in the wiring pattern st...
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Abstract
The invention provides a laser direct rendering apparatus which can perform the rotation regulation for the projection position of the beam simply and accurately. A glass board between a DMD and a substrate (W) is rectangular and kept on a piezo-electric element supported by a fixed frame. The piezo-electric element is arranged at two opposite ends of the glass board, i.e. at four corners of the rectangular glass board and controlled by a torsion control device. The piezo-electric elements are respectively expanded and shortened so as to make the ends turn to the opposite direction. Thus, the surface angle of the glass board is switched so as to regulate the irradiation position of the laser beam on the substrate (W) through the glass board.
Description
technical field [0001] The invention relates to a laser direct drawing device. Background technique [0002] In the laser direct imaging method (Laser Direct Imaging: laster Direct Imaging (hereinafter referred to as LDI)), by projecting a plurality of laser beams onto predetermined positions such as a target substrate mounted on a moving table, A latent image of the wiring pattern is formed in the photoresist on the substrate, and by performing the formation of the latent image according to the wiring pattern data, direct exposure can be performed without using a photomask. Thereby, the time of an exposure process can be shortened, and the laser direct drawing method is also gradually used in the manufacture of a printed circuit board. [0003] In this LDI, a DMD (Digital Micromirror Device: Digital Micromirror Device) which is a spatial light modulator is used to individually control ON / OFF of the laser beam. A plurality of (for example, 1024×768) mirrors with a size of ...
Claims
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IPC IPC(8): G03F7/00
CPCG03F7/2053G03F7/70383
Inventor 安藤护俊
Owner ADTEC ENG