Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target

A ceramic, free technology, applied in the field of ceramics and target components, preparation of high-density ceramics, electrodes of electrochemical devices

Active Publication Date: 2013-05-15
加拿大魁北克电力公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0036] There is also a need to provide a method that can be carried out by persons without specific skills in the field of ceramics or sintering, advantageously, the method must be able to obtain targets or target elements, in particular, make it possible to easily produce large surface area target

Method used

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  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target
  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target
  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target

Examples

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example

[0198] The following examples are provided for illustrative purposes only and should not be construed as constituting any limitation on the subject matter of the present invention.

example 0

[0199] Example 0——Preparation of commercially available ITO ceramics

[0200] In order to prepare a diameter of 5cm, the composition of In 1.9 sn 0.1 o 3 , a round ITO target (ceramic) with a weight equal to 50g ( Figure 2A ), following the experimental protocol detailed below.

[0201] Step 1) 47.3173 g of In 2 o 3 and 2.6827g of SnO 2 Mix; for this purpose, put the above powder mixture into Figure 34 One of the two agate grinding jars shown, each containing 50 agate balls 8mm in diameter; add 30ml of ethanol; place the agate lid on as shown; then, as shown, "Ball milling" was performed at 250 rpm for 3 hours. The powder thus mixed in ethanol was then placed in a beaker and dried by heating the powder at 110° C. in air for 8 hours.

[0202] Step 2) putting the powder into a cylindrical stainless steel mold with an inner diameter of 60mm, and placing the powder at 25 tons / cm 2 Press for 10 minutes. A compacted target is thus obtained.

[0203]Step 3) Gently (as i...

example 1

[0204] Example 1 - ITZO target used to prepare transparent metal electrodes for optoelectronic devices

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Abstract

The invention relates to a method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high densitythereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.

Description

technical field [0001] The invention relates to a method for preparing ceramics, in particular to a method for preparing high-density ceramics. [0002] The invention also relates to ceramics and target elements obtained by carrying out the method of the invention. These ceramics and target elements are characterized by excellent mechanical properties, especially a high apparent density close to the theoretical density. [0003] Furthermore, the invention relates to the use of these ceramics and target elements, in particular by carrying out said method to be able to prepare membranes as thin films by sputtering from said targets and to prepare them for use in electrochemical devices (microgenerators, electro- Color-changing devices, gas sensors, etc.) electrodes. [0004] The membranes and electrodes thus obtained, especially those obtained as thin films, which have particularly advantageous properties, also form an aspect of the invention. Background technique [0005] ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/01C25B11/04
CPCC04B35/462C04B2235/3206C04B2235/77C04B2235/3284C04B2235/3279C04B35/64C23C14/3414C04B35/01C04B35/645C04B2235/3293C04B2235/3203C04B2235/3286
Inventor 居伊·康佩伊亚德·萨阿德丁卡里姆·扎吉尼
Owner 加拿大魁北克电力公司
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