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Storing apparatus and transporting system with storage

A technology for safekeeping and transport vehicles, which is applied in storage devices, transportation and packaging, lighting and heating equipment, etc. It can solve the problems of inability to access the stopped state of the robot handling system and high cost, so as to achieve effective utilization, improve economic benefits, Effect of available hardware resources

Inactive Publication Date: 2009-09-30
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of small storage room can be provided at a relatively low price due to the small number of shelves. However, for controlling a small storage room of this type, if the above-mentioned control device is used, it will cost a lot of money.
Here, it is desirable to use one control device to control multiple access warehouses, but if the control device fails or is abnormal, for example, it will not be possible to use all the access robots to perform warehouse entry and exit operations, so that at least a part of the handling system Technical issues that are stalled

Method used

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  • Storing apparatus and transporting system with storage
  • Storing apparatus and transporting system with storage
  • Storing apparatus and transporting system with storage

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0081] First, refer to Figure 1 to Figure 3 The structure of the storage room related to the first embodiment will be described. hereby, figure 1 It is a perspective view showing the appearance of a transfer system having a storage warehouse related to the first embodiment, figure 2 system for display figure 1 The cross-sectional view of the internal structure model of the vault, image 3 It is a sectional view showing the engagement state of the goods with respect to the first loading surface and the second loading surface of the first embodiment.

[0082] exist figure 1 Among them, the conveyance system 100 has a rail 1 , a conveyance vehicle 2 , an access warehouse 10 , and a control unit 20 . The transport system 100 drives the transport vehicle 2 to transport the wafer cassette 3 on the track 1 . The rail 1 is an example of the "rail" in the present invention, and is a rail for the transport vehicle 2 to travel.

[0083] The transport vehicle 2 is an Overhead Hoi...

no. 2 Embodiment approach

[0111] Next, as a second embodiment of the present invention, refer to Figure 6A safekeeping storehouse group composed of a plurality of storehouses according to the first embodiment will be described. hereby, Figure 5 In order to show the appearance of the transportation system with the storage warehouse group related to this embodiment, it is the same as figure 1 Sectional drawing with the same intention. In addition, at Figure 6 In the vault shown, about the same figure 1 Elements with the same structure in the conveying system 100 shown are denoted by the same numbers, and their descriptions are omitted.

[0112] At Figure 6 Among them, the transportation system 500 has a track 1, a transportation vehicle 2, and a plurality of access warehouse groups 10x. Handling system 500 series and figure 1 The conveying system 100 shown is the same, and the conveying vehicle 2 is driven by a control unit not shown, and the wafer cassette 3 is conveyed on the track.

[0113...

no. 3 Embodiment approach

[0120] Next, as a third embodiment of the present invention, refer to Figure 7 The following will describe the transfer system of the storage room device of the storage room of the first embodiment and the storage room group of the second embodiment. hereby, Figure 7 It is a functional block diagram showing the structure of the transportation system related to the third embodiment.

[0121] At Figure 7 Among them, the transportation system 600 has a plurality of control units 20, a material control system (MCS, Material Control System) 21, an overhead hoist vehicle control unit (OHVC, Overhead Hoist Vehicle Controller) 22, and a group information database (DB) 23. All of its parts are connected to each other with wired or wireless control lines. In the transport system 600, the multiple access warehouses 10 laid along the track 1 are divided into multiple groups G1, G2... as control units. like Figure 7 As shown, the group 1 is constituted by an access bank group 10x ...

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PUM

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Abstract

Storage apparatus and transporting system with storage. The storage apparatus is formed by paving storage grpoups along a rail and the storage groups are composed of a plurality of storages for loading and unloading goods separately between transporting vehicles for transporting goods of various base plates for accommodating or producing semiconductor members, and utilizing simple structure to improve efficiency of loading and unloading goods and maintaining hith operation efficiency. Each storage (10) is provided with: a driving device (11,13,14) capable of reciprocating the load (3) in a horizontal one direction and in a vertical direction; and a rack (15) having a plurality of rack portions at a plurality of stages in the vertical direction, each stage including one or a plurality of rack portions in the horizontal one direction, the rack portion capable of accommodating or putting thereon the load to be displaced by the driving device. The storing apparatus is provided with a plurality of controllers (20), which control the loading and unloading in respective groups, each group comprising at least one or a plurality of storages of the plurality of the storages, and which can perform complementary control with each other.

Description

technical field [0001] The technical field of the present invention relates to a transport system that transports on rails, for example, goods such as a front opening unified pod (Front Opening Unified Pod, hereinafter abbreviated as FOUP) that accommodates various substrates for manufacturing semiconductor elements, etc., on adjacent rails. Storage warehouses such as access warehouses where goods are temporarily stored at the location, storage warehouse groups composed of a plurality of such storage warehouses, especially storage warehouse devices that lay such storage warehouse groups along rails, and storage facilities equipped with such storage warehouses Transport system with storage for warehouse installations. Background technique [0002] This kind of storage is laid on the side of the track that is adjacent to the track that the transport vehicles such as vehicles travel, and a plurality of racks are arranged in the storage to store a plurality of goods transported ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/02B65G1/04B65G1/137B65G49/07
CPCH01L21/67775B65G37/02B65G2201/0297H01L21/67769H01L21/67733H01L21/67H01L21/683
Inventor 村田正直山路孝山路照也
Owner MURATA MASCH LTD