Motion-decoupling XY-direction precise locating platform

Abstract

The invention discloses a motion-decoupling XY-direction precise locating platform which comprises a first and a second voice coil linear motors, a first and a second coupling flanges, a first and a second linear bearing assemblies, a working platform and a support platform component, wherein, the first and the second voice coil linear motors are respectively connected with the working platform via the first coupling flange and the first linear bearing assembly as well as the second coupling flange and the second linear bearing assembly in an orthogonal manner; the first voice coil linear motor is connected with the first coupling flange; the first coupling flange is connected with the first bearing body of the first linear bearing assembly; the first bearing pedestal of the first linear bearing assembly is connected with the working platform; the second voice coil linear motor is connected with the second coupling flange; the second coupling flange is connected with the second bearing body of the second linear bearing assembly; the second bearing pedestal of the second linear bearing assembly is connected with the working platform; the working platform is supported by the support platform component; and the support platform component and the first and the second voice coil linear motors are arranged on the base.

Description

1. Technical field [0001] The invention relates to an XY plane motion positioning platform based on a two-degree-of-freedom parallel decoupling mechanism, which is directly driven by a voice coil linear motor, and is suitable for high-speed, high-speed positioning required in precision positioning engineering fields such as chip packaging, laser processing, and photoelectric detection. Acceleration and high-precision positioning requirements belong to the field of transmission mechanisms. 2. Background technology [0002] At present, in the industrial fields such as chip packaging, laser processing and photoelectric detection, with the improvement of product performance, quality and manufacturing cycle, the high speed, high acceleration and high speed directly related to production efficiency and product quality The importance of high-precision motion control systems is also becoming increasingly prominent, which urgently requires systems and equipment that can be positioned...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcomings of backlash, friction and insufficient rigidity in the transmission of ball screw (gear, rack) in the traditional XY positioning platform, and provide a parallel decoupling mechanism based on two degrees of freedom, And it adopts a fast and precise voice coil linear motor directly driven by a motion-decoupled XY direction precision positioning platform

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