Motion-decoupling XY-direction precise locating platform

A precision positioning and platform technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as backlash, friction and insufficient stiffness, and achieve high precision and dynamic performance, high stiffness, and bearing capacity. strong effect

Inactive Publication Date: 2009-10-14
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcomings of backlash, friction and insufficient rigidity in the transmission of ball screw (gear, rack) in the traditional XY positioning platform,

Method used

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  • Motion-decoupling XY-direction precise locating platform
  • Motion-decoupling XY-direction precise locating platform
  • Motion-decoupling XY-direction precise locating platform

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Embodiment Construction

[0020] The invention relates to an XY plane motion positioning platform based on a two-degree-of-freedom parallel decoupling mechanism. The platform consists of a base, a first voice coil linear motor, a second voice coil linear motor, a first connecting flange, a second connecting It consists of a flange, a first linear bearing assembly, a second linear bearing assembly, a working platform and a supporting platform assembly.

[0021] The following describes the present invention in more detail with reference to the drawings in the description, and on the basis of considering factors such as platform structure optimization and manufacturing process:

[0022] figure 1 It is a schematic diagram of the structural configuration of the XY direction precision positioning platform of the present invention. The parallel mechanism is a multi-branch transmission mechanism, which is composed of a fixed platform, a moving platform and multiple (two or more) branch chains. In a general par...

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Abstract

The invention discloses a motion-decoupling XY-direction precise locating platform which comprises a first and a second voice coil linear motors, a first and a second coupling flanges, a first and a second linear bearing assemblies, a working platform and a support platform component, wherein, the first and the second voice coil linear motors are respectively connected with the working platform via the first coupling flange and the first linear bearing assembly as well as the second coupling flange and the second linear bearing assembly in an orthogonal manner; the first voice coil linear motor is connected with the first coupling flange; the first coupling flange is connected with the first bearing body of the first linear bearing assembly; the first bearing pedestal of the first linear bearing assembly is connected with the working platform; the second voice coil linear motor is connected with the second coupling flange; the second coupling flange is connected with the second bearing body of the second linear bearing assembly; the second bearing pedestal of the second linear bearing assembly is connected with the working platform; the working platform is supported by the support platform component; and the support platform component and the first and the second voice coil linear motors are arranged on the base.

Description

1. Technical field [0001] The invention relates to an XY plane motion positioning platform based on a two-degree-of-freedom parallel decoupling mechanism, which is directly driven by a voice coil linear motor, and is suitable for high-speed, high-speed positioning required in precision positioning engineering fields such as chip packaging, laser processing, and photoelectric detection. Acceleration and high-precision positioning requirements belong to the field of transmission mechanisms. 2. Background technology [0002] At present, in the industrial fields such as chip packaging, laser processing and photoelectric detection, with the improvement of product performance, quality and manufacturing cycle, the high speed, high acceleration and high speed directly related to production efficiency and product quality The importance of high-precision motion control systems is also becoming increasingly prominent, which urgently requires systems and equipment that can be positioned...

Claims

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Application Information

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IPC IPC(8): H01L21/68
Inventor 张志胜郑建勇史金飞陈芳柳俊
Owner SOUTHEAST UNIV
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